CAJ | 학술논문

重点研究了聚焦离子束的相关原理和应用。利用聚焦离子束应力引入致形变（ Focused Ion Beam Stress-Introduced De-formation， FIB-SID）技术与常规微加工工艺相结合，制备微型金属无源螺旋电感的设计方法和工艺流程，并对其电学性能进行初步高频测试。首先在SOI（ Silicon-on-Insulator）基片上通过光刻、溅射以及各项同性刻蚀等常规工艺制得悬浮的金属悬臂梁，再利用FIB刻蚀原理进行应力引入，通过控制注入离子剂量、 FIB应力引入的次数、 FIB扫描的间距等试验参数制得不同尺寸结构的三维螺旋金属无源电感。最后，采用安捷伦网络分析仪与微波探针台，使用GSG结构及相应的去嵌方法，对微型金属螺线管电感进行了高频测试。得出了三维螺旋微纳电感的电感值、品质因子、电压驻波比、回波损耗随频率变化关系。
중점연구료취초리자속적상관원리화응용。이용취초리자속응력인입치형변（ Focused Ion Beam Stress-Introduced De-formation， FIB-SID）기술여상규미가공공예상결합，제비미형금속무원라선전감적설계방법화공예류정，병대기전학성능진행초보고빈측시。수선재SOI（ Silicon-on-Insulator）기편상통과광각、천사이급각항동성각식등상규공예제득현부적금속현비량，재이용FIB각식원리진행응력인입，통과공제주입리자제량、 FIB응력인입적차수、 FIB소묘적간거등시험삼수제득불동척촌결구적삼유라선금속무원전감。최후，채용안첩륜망락분석의여미파탐침태，사용GSG결구급상응적거감방법，대미형금속라선관전감진행료고빈측시。득출료삼유라선미납전감적전감치、품질인자、전압주파비、회파손모수빈솔변화관계。
The combination of Focused Ion Beam Stress-introduced Deformation ( FIB-SID) and micro-fabrication tech-nology is focused on, and the fabrication process and test methods of metal passive micro-helix inductor are described. First of all, the suspended metal cantilever is made on SOI(Silicon-on-insulator) by photolithography, sputtering and iso-tropic etching.Then, the stress is introduced to fabricate 3D metal passive micro-helix inductor with different sizes by con-trolling ion dose, FIB stress introduced time, FIB scanning pitch.Finally, the metal passive micro-helix inductor is tested at high frequency with the help of Agilent network analyzers and microwave probe station using GSG test structure and de-embedding process.The relationship between the Inductance value, quality factor, voltage standing wave ratio、 return loss of micro-helix inductors against frequency is obtained.