CAJ | 학술논문

简单介绍了聚焦离子束（ FIB）的历史和工作原理，以及将离子束和电子束合为一体的双束系统。具体讨论了双束系统上的主要功能，如离子束镜筒、气体注入系统（ GIS）、超高分辨率的扫描电镜镜筒及将离子束和电子束合为一体的独特优势。例举了双束系统的一系列应用，如制作纳米图形用的多种加工方法，气体注入系统在制作纳米图形中的应用，透射电镜及原子探针的样品制备，三维形貌表征，三维能谱成分表征，三维 EBSD 晶体位相表征和电路修补。详细介绍了这些相关应用的发展现状及特点，比较了各种应用的优缺点。文章还介绍了在中国科研领域双束系统的应用状况及中国科研工作者利用双束系统获得的重要成果。
간단개소료취초리자속（ FIB）적역사화공작원리，이급장리자속화전자속합위일체적쌍속계통。구체토론료쌍속계통상적주요공능，여리자속경통、기체주입계통（ GIS）、초고분변솔적소묘전경경통급장리자속화전자속합위일체적독특우세。례거료쌍속계통적일계렬응용，여제작납미도형용적다충가공방법，기체주입계통재제작납미도형중적응용，투사전경급원자탐침적양품제비，삼유형모표정，삼유능보성분표정，삼유 EBSD 정체위상표정화전로수보。상세개소료저사상관응용적발전현상급특점，비교료각충응용적우결점。문장환개소료재중국과연영역쌍속계통적응용상황급중국과연공작자이용쌍속계통획득적중요성과。
The history of Focused Ion Beam ( FIB) and its working principle are briefly reviewed .DualBeam System, namely combined FIB and SEM into one system , is introduced.Main features on such DualBeamsystem and the trend of its development are discussed in more details, including FIB column, gas injection system (GIS), ultra-high resolution SEM column and the advantages of combining FIB column with SEM column into one system .Main applications of such a DualBeam systemare discussed by examples , such as the various pattern generation techniques used in nano-prototyping, the use of GIS in nano-prototyping, sample preparation for transmission electron microscope as well as for atom probe , 3 dimensional (3D) characterization for morphology, 3D chemistry by EDS and 3D crystallography by EBSD, and circuit editing.The related application status and progress are introduced in details .The application status of Dualbeam in Chi-nese scientific research and the important progress by Chinese researchersare discussed briefly .