CAJ | 학술논문

原子力显微镜（Atomic Force Microscope，AFM）的一个重要应用就是对样品表面的微纳米级尺寸特征进行成像，但在扫描成像的过程中，由于针尖的影响作用，使得扫描所获图像是原子力探针和样品共同作用的结果，而不是样品形貌的真实描述。本文通过用具有不同形状、尺寸针尖的探针对同一样品进行成像，将所得图像进行分析、对比，模拟和实验结果表明，为获得更准确的特征尺寸成像，对有不同特征尺寸的样品，需要选择适合的探针对其实施成像。
원자력현미경（Atomic Force Microscope，AFM）적일개중요응용취시대양품표면적미납미급척촌특정진행성상，단재소묘성상적과정중，유우침첨적영향작용，사득소묘소획도상시원자력탐침화양품공동작용적결과，이불시양품형모적진실묘술。본문통과용구유불동형상、척촌침첨적탐침대동일양품진행성상，장소득도상진행분석、대비，모의화실험결과표명，위획득경준학적특정척촌성상，대유불동특정척촌적양품，수요선택괄합적탐침대기실시성상。
AFM plays an important role in imaging feature size of samples with micro/ nano-scale. But as the interac-tion between the probe and sample,the image is usually a combination of them,and it is just an approximate descrip-tion of the sample. This paper the images of a fixed sample with probe of different shapes and sizes are presented,the data is compared and the results are concluded. Simulations and experiments demonstrate that the probe should be cho-sen properly to image based on the scale of different samples.