CAJ | 학술논문

高功率的激光系统对光学元件的抗激光损伤性能的要求不断提高。主要研究薄膜在脉冲激光诱导作用下的损伤特性及其机理，实验采用YAG脉冲激光器对TiO2/SiO2薄膜样片进行1-on-1方式的激光诱导。实验结果表明：采用低能量激光诱导对薄膜的光学透过率影响不大。经低能量激光诱导后，薄膜的表面结构缺陷得以修复，表面结构趋于完整，变得均匀和细腻。脉冲激光诱导TiO2/SiO2薄膜样片，激光能量阶较小时，其损伤阈值随能量增加而增加，损伤阈值最大可增加1倍；激光能量阶较大时，其损伤阈值随能量增加而减小。
고공솔적격광계통대광학원건적항격광손상성능적요구불단제고。주요연구박막재맥충격광유도작용하적손상특성급기궤리，실험채용YAG맥충격광기대TiO2/SiO2박막양편진행1-on-1방식적격광유도。실험결과표명：채용저능량격광유도대박막적광학투과솔영향불대。경저능량격광유도후，박막적표면결구결함득이수복，표면결구추우완정，변득균균화세니。맥충격광유도TiO2/SiO2박막양편，격광능량계교소시，기손상역치수능량증가이증가，손상역치최대가증가1배；격광능량계교대시，기손상역치수능량증가이감소。
Demand for optical element resistance of laser damage is higher and higher in the high power laser system. The damage characteristics and mechanism of film by pulse laser induced damage was researched. The experiments used by YAG pulsed laser for TiO2/SiO2 thin film were offered for 1-on-1 way of laser induced. The experimental results show that the impact on the optical transmittance of thin film is not big in low energy laser induced. Under the low energy laser induced, film surface structure defect is repaired . The surface structure tends to be complete , and becomes uniform and fine . Under pulsed laser induced TiO2/SiO2 thin film, when the laser energy order is smaller, the laser damage threshold of thin film increases with the increased energy, damage threshold maximum can increase 1 times. When the laser energy order is bigger, thin film damage threshold decreases with the increased energy order.