CAJ | 학술논문

提出了一种7通道并行测试的MEMS加速度计自动化测试分析系统，该系统高度集成多种功能，实现了加速度计高效率测试与分析。在常规测试系统基础上，该系统通过上层应用程序Labview实现了单一人机交互终端对振动台、高低温交变湿热试验箱和供电电源等设备的控制。灵敏度、线性度、重复性、滞回特性、温度特性、频响特性等参数指标，能够在控制终端通过分析测试数据同时获得，并以报表形式输出。在一般情况下，传感器测试效率可达50只/h，大大高于传统的非自动化测试系统。经过评估测试，该测试系统还表现出较高的测试精度及稳定性和可靠性，测试误差小于±2.5%。该自动化测试系统为进一步降低MEMS传感器成本，促进其在物联网领域的大规模应用奠定了基础。
제출료일충7통도병행측시적MEMS가속도계자동화측시분석계통，해계통고도집성다충공능，실현료가속도계고효솔측시여분석。재상규측시계통기출상，해계통통과상층응용정서Labview실현료단일인궤교호종단대진동태、고저온교변습열시험상화공전전원등설비적공제。령민도、선성도、중복성、체회특성、온도특성、빈향특성등삼수지표，능구재공제종단통과분석측시수거동시획득，병이보표형식수출。재일반정황하，전감기측시효솔가체50지/h，대대고우전통적비자동화측시계통。경과평고측시，해측시계통환표현출교고적측시정도급은정성화가고성，측시오차소우±2.5%。해자동화측시계통위진일보강저MEMS전감기성본，촉진기재물련망영역적대규모응용전정료기출。
A novel automatic testing and analyzing system with seven channels for MEMS accelerometers was introduced in this article. This system was designed with multi-function and high level of integration based on multi-channel and parallel configuration, leading to high-efficient testing and analyzing. Based on the conventional testing systems, the Labview-based top level application software in this system was used to realize manipulation of the electro-mechanical vibrator, temperature & humidity chamber, the voltage bias and so on. Meanwhile, parameters such as sensitivity, linearity, repeatability, hysteresis behavior, temperature behavior and frequency behavior were able to be measured and exported as reports all in once. Normally, the efficiency of sensor testing could achieve 50 devices/h, much higher than traditional manual systems. Experimental results show that the system is built up with high accuracy, stability and reliability, with the testing error less than ±2.5%. This prototype enables the cost reduction of MEMS sensors, thus the mass application in the domain of internet of things (IOT).