红外与激光工程
紅外與激光工程
홍외여격광공정
INFRARED AND LASER ENGINEERING
2014年
6期
1905-1908
,共4页
表面面形%中高频误差%泽尼克多项式%仿真
錶麵麵形%中高頻誤差%澤尼剋多項式%倣真
표면면형%중고빈오차%택니극다항식%방진
surface figure%mid-and-high frequency errors%Zernike polynomial%simulation
在光学设计和装调过程中,常常需要随时根据面形质量来预估光学系统的性能,传统的方法都是借助泽尼克多项式拟合光学表面面形来进行仿真评价。但非球面光学元件在加工过程中常常产生中高频误差,这类误差会引入小角度的散射,进而影响光学系统像质评价。提供了一种“点对应点”的仿真方法,通过准确评价面形质量获得高精度的像质预估结果,解决了传统的泽尼克多项式不能描述中高频成分的关键问题。该方法在实际光学系统中进行了验证,仿真结果和实测数据吻合度优于90%。
在光學設計和裝調過程中,常常需要隨時根據麵形質量來預估光學繫統的性能,傳統的方法都是藉助澤尼剋多項式擬閤光學錶麵麵形來進行倣真評價。但非毬麵光學元件在加工過程中常常產生中高頻誤差,這類誤差會引入小角度的散射,進而影響光學繫統像質評價。提供瞭一種“點對應點”的倣真方法,通過準確評價麵形質量穫得高精度的像質預估結果,解決瞭傳統的澤尼剋多項式不能描述中高頻成分的關鍵問題。該方法在實際光學繫統中進行瞭驗證,倣真結果和實測數據吻閤度優于90%。
재광학설계화장조과정중,상상수요수시근거면형질량래예고광학계통적성능,전통적방법도시차조택니극다항식의합광학표면면형래진행방진평개。단비구면광학원건재가공과정중상상산생중고빈오차,저류오차회인입소각도적산사,진이영향광학계통상질평개。제공료일충“점대응점”적방진방법,통과준학평개면형질량획득고정도적상질예고결과,해결료전통적택니극다항식불능묘술중고빈성분적관건문제。해방법재실제광학계통중진행료험증,방진결과화실측수거문합도우우90%。
During the process of optical design and assembly,it is necessary to estimate the performance of optical system based on the surface quality of the mirrors. The traditional way is to use the Zernike polynomial, which is restricted to depict the consecutive and smooth surface. Otherwise, get the ideal surface during aspherical surface polishing is very difficult, the mid-and-high frequency errors which is very harmful to the optical system’s image quality will be produced at the same time. In this paper, a new "point-to-point" method was introduced, any surface with mid-and-high frequency errors could be exactly simulated, and the optical system’s performance can be estimated accurately. An example of the optical system was cited, it was revealed that the camera’s simulated performace is very close to the measurement, the coincident to real system is over 90%.