CAJ | 학술논문

为了得到较理想的激光刻蚀结果，采用355 nm固体紫外激光，分别在空气与水中进行了氧化铝陶瓷片激光刻蚀实验。对激光主要参量如脉冲能量密度、激光扫描速率、激光重复频率等对水下刻蚀深度和质量的影响进行了对比研究；对激光刻蚀的机理以及水辅助刻蚀的物理过程进行了分析，分别得到了紫外激光在空气中与水下的刻蚀形貌与不同激光参量下的刻蚀深度数据。结果表明，水辅助激光刻蚀可以提高刻蚀效率，改善刻蚀质量；水下激光刻蚀深度与激光的脉冲能量密度、加工速率、重复频率和水的深度等参量有密切的关系；水辅助激光刻蚀过程中水的冷却作用以及产生的空泡有效防止去蚀材料的二次黏附，避免变质层的形成，既提高了刻蚀质量，同时也增加了刻蚀深度。
위료득도교이상적격광각식결과，채용355 nm고체자외격광，분별재공기여수중진행료양화려도자편격광각식실험。대격광주요삼량여맥충능량밀도、격광소묘속솔、격광중복빈솔등대수하각식심도화질량적영향진행료대비연구；대격광각식적궤리이급수보조각식적물리과정진행료분석，분별득도료자외격광재공기중여수하적각식형모여불동격광삼량하적각식심도수거。결과표명，수보조격광각식가이제고각식효솔，개선각식질량；수하격광각식심도여격광적맥충능량밀도、가공속솔、중복빈솔화수적심도등삼량유밀절적관계；수보조격광각식과정중수적냉각작용이급산생적공포유효방지거식재료적이차점부，피면변질층적형성，기제고료각식질량，동시야증가료각식심도。
To obtain better result of laser etching , micro-machining of alumina ceramics with ultraviolet ( UV) laser (355nm) was conducted in air and water respectively .The impact of laser parameters, such as laser fluence, scan speed, and laser frequency on the etching depth was investigated .The mechanism of laser etching and the physical process of water-assisted etching were studied .Etching morphology in air and water with UV laser and etching depth with different laser parameters were obtained .The results show that water-assisted laser etching can improve the etching efficiency and etching surface quality .The etching depth has close relationship with laser fluence , scan speed , laser frequency and water depth .The water cooling effect and vacuum occurring during water-assisted etching could prevent the secondary adhesion to the eclipse material effectively and the formation of metamorphic layer .