激光技术
激光技術
격광기술
LASER TECHNOLOGY
2014年
3期
380-383
,共4页
激光技术%激光驻波场%高斯激光%倾斜度
激光技術%激光駐波場%高斯激光%傾斜度
격광기술%격광주파장%고사격광%경사도
laser technique%laser standing wave field%Gaussian laser%slope
为了研究原子光刻实验中基片对汇聚激光场的影响，基于几何光学，采用数值仿真的方法，研究了基片表面的倾斜度对光学势阱的影响。结果表明，当基片表面相对于激光驻波中轴线正倾斜时，基片表面会形成一个无光场区，使光学势阱为0，且在z方向上光学势阱会发生一个零值突变；当基片表面相对于驻波中轴线负倾斜时，基片表面永远存在光场，在z方向上光学势阱不会发生零值突变，且光学势阱相对于z＝0会出现对称现象。该研究结果对激光汇聚原子沉积实验具有指导意义。
為瞭研究原子光刻實驗中基片對彙聚激光場的影響，基于幾何光學，採用數值倣真的方法，研究瞭基片錶麵的傾斜度對光學勢阱的影響。結果錶明，噹基片錶麵相對于激光駐波中軸線正傾斜時，基片錶麵會形成一箇無光場區，使光學勢阱為0，且在z方嚮上光學勢阱會髮生一箇零值突變；噹基片錶麵相對于駐波中軸線負傾斜時，基片錶麵永遠存在光場，在z方嚮上光學勢阱不會髮生零值突變，且光學勢阱相對于z＝0會齣現對稱現象。該研究結果對激光彙聚原子沉積實驗具有指導意義。
위료연구원자광각실험중기편대회취격광장적영향，기우궤하광학，채용수치방진적방법，연구료기편표면적경사도대광학세정적영향。결과표명，당기편표면상대우격광주파중축선정경사시，기편표면회형성일개무광장구，사광학세정위0，차재z방향상광학세정회발생일개령치돌변；당기편표면상대우주파중축선부경사시，기편표면영원존재광장，재z방향상광학세정불회발생령치돌변，차광학세정상대우z＝0회출현대칭현상。해연구결과대격광회취원자침적실험구유지도의의。
In order to study effect of substrate on the focusing laser field in atom lithograph , based on geometrical optics and numerical simulation , effects of substrate surface slope on optical potential were studied .The results indicate that when the substrate surface has positive slope related to the laser standing wave axis , there is an area without light illumination on the surface whose optical potential is zero , and the curve of optical potential in z direction will suddenly vanish;when the substrate surface has negative slope related to the laser standing wave axis , all the surface will be illuminated by the laser and the curve of optical potential in z direction will vary smoothly to zero , and the optical potential will be symmetric related to z=0.The results are useful for the experiment of laser-focusing atom deposition .
