CAJ | 학술논문

利用GaN MOCVD设备的气源输运系统结构，分析了单稀释MO源管路和双稀释 MO 源管路的工作原理及特点，提出了 MO 源摩尔流量的计算公式和一种零死区管路设计方案；并且把管路压差控制和气体自动补偿技术应用到了 MOCVD 设备中。
이용GaN MOCVD설비적기원수운계통결구，분석료단희석MO원관로화쌍희석 MO 원관로적공작원리급특점，제출료 MO 원마이류량적계산공식화일충령사구관로설계방안；병차파관로압차공제화기체자동보상기술응용도료 MOCVD 설비중。
Use of GaN MOCVD equipment of air transport system seructure,the working princi-ple and characteristics of single dilution and double dilution pipe of MO source are studied.Then the calculation formulas of MO source molar flow and a design version of the pipe without dead space are presented.At last,the technology of pipeline pres-sure control and flow automatic compensation are integrated into the MOCVD equipment.