CAJ | 학술논문

为增大静电驱动二维微扫描镜的机械转角，基于非线性动力学理论研究了不同梳齿结构对其振幅的影响，理论上得到发散型梳齿分布相较于平行型梳齿分布具有更大的机械转角。此外，采用绝缘体上硅( SOI)加工工艺设计并制作了这两种结构的微扫描镜，并对其相关特性进行了测试。测试结果表明：在相同的驱动电压下，发散型结构始终都比平行型结构具有更大的机械转角，与仿真结果基本一致；当加载驱动电压为42 V的方波信号时，发散型结构扫描镜的可动框架和镜面的最大机械转角可以达到12.3°、13.49°，而平行型结构扫描镜的可动框架和镜面的最大机械转角则为10.25°、11.68°。
위증대정전구동이유미소묘경적궤계전각，기우비선성동역학이론연구료불동소치결구대기진폭적영향，이론상득도발산형소치분포상교우평행형소치분포구유경대적궤계전각。차외，채용절연체상규( SOI)가공공예설계병제작료저량충결구적미소묘경，병대기상관특성진행료측시。측시결과표명：재상동적구동전압하，발산형결구시종도비평행형결구구유경대적궤계전각，여방진결과기본일치；당가재구동전압위42 V적방파신호시，발산형결구소묘경적가동광가화경면적최대궤계전각가이체도12.3°、13.49°，이평행형결구소묘경적가동광가화경면적최대궤계전각칙위10.25°、11.68°。
In order to increase the deflection, the effect of comb structure on the twisting amplitude for two-dimensional(2D)microscanner is researched on basis of the nonlinear dynamics theory in this paper,and it can be obtained that the effect of the divergent distribution is superior to parallel distribution. Besides, the samples are fabricated based on silicon-on-insulator(SOI)technology,and then the electromechanical characteristic is tested. The test results demonstrate the microscanner with divergent comb distribution has greater twisting amplitude,which agrees with the theoretical analysis. The microscanner with divergent distribution could generate maximum twisting angles of 12. 3° and 13. 49° under the square wave of 42 V, while the sample with parallel distribution could generate maximum twisting angles of 10. 25° and 11. 68° under the same square wave.