CAJ | 학술논문

直线电机具有精度高、响应快等优点，广泛应用于半导体制造设备中。直线电机控制机构Z向运动时，经常出现掉电或故障导致的电机动子跌落而发生损坏晶圆的情况。利用电磁铁螺线管设计了一种电机掉电保护装置，建立动力学模型，应用Adams软件进行了动力学仿真，获得了挂钩转角与时间的关系曲线，并通过搭建实验平台，测试了该系统的反应时间。实验表明，反应时间的仿真与实验结果吻合较好，该装置可以应用于直线电机保护中。
직선전궤구유정도고、향응쾌등우점，엄범응용우반도체제조설비중。직선전궤공제궤구Z향운동시，경상출현도전혹고장도치적전궤동자질락이발생손배정원적정황。이용전자철라선관설계료일충전궤도전보호장치，건립동역학모형，응용Adams연건진행료동역학방진，획득료괘구전각여시간적관계곡선，병통과탑건실험평태，측시료해계통적반응시간。실험표명，반응시간적방진여실험결과문합교호，해장치가이응용우직선전궤보호중。
Linear motors have advantages of high precision,fastly response etc.,so widely used in semiconductor manufacturing equipment. Linear motor control mechanism to move Z direction movement,often damaged wafers by motor mover falling down or some failures. In this paper, designed of a power-off protection device using the solenoid electromagnet ,establishment of dynamic model,application of software Adams to dynamic simulation,won the curve of hook angle and time, then built experimental platform to test response time of the system. Experimental results show that the response time of the simulation agree well with the experimental results ,and the device can be applied to the protection of linear motor.