CAJ | 학술논문

针对微电子机械系统领域中横向加载单向变形静电微驱动器存在位移过小或驱动电压过大的问题，提出一种纵横弯曲硅基大位移低电压静电微驱动器.分析了静电调节力、温度应力和挤压力对微梁变形的影响.基于纵横弯曲理论，推导出位移放大系数δ.仿真结果发现，纵横弯曲微驱动器的驱动机理实质是通过位移放大系数δ，放大单向加载横向驱动器变形量，从而实现大位移、低电压驱动目的；5 V驱动电压可实现高达17.5μm的位移，远大于目前传统横向加载单向变形微驱动器的变形量.
침대미전자궤계계통영역중횡향가재단향변형정전미구동기존재위이과소혹구동전압과대적문제，제출일충종횡만곡규기대위이저전압정전미구동기.분석료정전조절력、온도응력화제압력대미량변형적영향.기우종횡만곡이론，추도출위이방대계수δ.방진결과발현，종횡만곡미구동기적구동궤리실질시통과위이방대계수δ，방대단향가재횡향구동기변형량，종이실현대위이、저전압구동목적；5 V구동전압가실현고체17.5μm적위이，원대우목전전통횡향가재단향변형미구동기적변형량.
In the Micro Electro-Mechanical System (MEMS) field,the traditional electrostatic micro actuator of transverse loading and unidirectional deformation is faces problems of the oversized voltage and undersized displacement. An electrostatic silicon micro actuator featuring large-displacement and low-voltage is presented.Displacement amplification coefficientδis derived based on the principle of vertically-horizontally bending. Simulation results show that the drive mechanism of the vertically-horizontally bending micro actuator is to amplify the deformation of unidirectional transverse loading by the displacement amplification coefficientδ.The purpose of large-displacement at low-driving voltage is realized.The effects of electrostatic adjustment force,temperature stress and extruding force on micro beam deformation are analyzed,respectively.Simulation shows that when the driving voltage is 5 V,the output displacement is as high as 1 7.5μm.The deformation is much larger than that of the traditional micro actuator of transverse loading and unidirectional deformation.