CAJ | 학술논문

试图自行设计制造价格低廉，实用性强的大口径球面干涉仪，并可推广应用于大部分科研生产单位，解决大尺寸光学零件加工中的面型测试问题。通过对平面干涉仪的各种型式的比较和选择，达到精确测量高精度大口径光学元件的目的。采用反射式平行光管式的卧式斐索干涉仪，标准镜采用非球面消色差，光学元件少，结构简单。采用共路干涉降低了外界干扰对测量的影响，同时共光路干涉也可降低干涉仪各光学元件加工面形精度的要求。
시도자행설계제조개격저렴，실용성강적대구경구면간섭의，병가추엄응용우대부분과연생산단위，해결대척촌광학령건가공중적면형측시문제。통과대평면간섭의적각충형식적비교화선택，체도정학측량고정도대구경광학원건적목적。채용반사식평행광관식적와식비색간섭의，표준경채용비구면소색차，광학원건소，결구간단。채용공로간섭강저료외계간우대측량적영향，동시공광로간섭야가강저간섭의각광학원건가공면형정도적요구。
Attempt to design and manufacture of inexpensive, practical large-diameter spherical interferometer used in most of the research and production units, and can be extended to solve the problem of large-size optical parts processing face test. The comparison of the various types of the planar interferometer, selection, to achieve the purpose of accurate measurement of high-precision optical element of large caliber. Employing a reflective collimator formula horizontal Fizeau interferometer, the standard mirror aspheric achromatic optical element results simple. The common path interferometer reduce outside interference measure-ments, the total optical path interferometer can also reduce the interferometer optical components machining surface accuracy re-quirements.