CAJ | 학술논문

针对传感器的机械迟滞问题,提出一种减小迟滞偏移的方法,设计了低迟滞误差的电容式气压传感器。使用ANSYS和FLUENT软件模拟电容式传感器的工作性能,分析传感器的温漂特性、电容灵敏度及加热功率与通孔大小的匹配问题。分析结果表明传感器的电容温漂为0.029 fF/K,电容灵敏度为30 fF/hPa；加热空腔气体可以驱动空腔内气压增加20 hPa,超过传感器的迟滞误差范围,为低迟滞误差传感器的设计和结构优化提供了依据。
침대전감기적궤계지체문제,제출일충감소지체편이적방법,설계료저지체오차적전용식기압전감기。사용ANSYS화FLUENT연건모의전용식전감기적공작성능,분석전감기적온표특성、전용령민도급가열공솔여통공대소적필배문제。분석결과표명전감기적전용온표위0.029 fF/K,전용령민도위30 fF/hPa；가열공강기체가이구동공강내기압증가20 hPa,초과전감기적지체오차범위,위저지체오차전감기적설계화결구우화제공료의거。
For the problem of mechanical hysteresis,a method of reducing hysteresis offset is presented and a low hysteresis capacitive pressure sensor is designed. The sensor working performance is simulated with ANSYS and FLUENT software to analyse temperature drift of sensor, its capacitance sensitivity, the heating power and the matching via hole size. Analysis results show that sensor capacitive temperature drift of the sensor is 0. 029 fF/K, capacitive sensitivity is 30 fF/kPa. Heating cavity air can make the cavity air pressure increase 20 hPa more over ± 0. 2 hPa than sensor hysteresis error. This lays the foundation for the design and the structure optimization of low hysteresis sensor.