CAJ | 학술논문

透明非晶氧化物薄膜晶体管(TAOS-TFT)相对于硅基 TFT 具有均一性好、迁移率高、兼容低温柔性基板等优点，能够广泛用于平板有源显示领域特别是有源矩阵有机发光二极管显示(AMOLED)的驱动背板。溶胶-凝胶法制备薄膜晶体管不需要高真空的环境，成本低、工艺简单，化合物成分易于控制，能够均匀定量地实现分子水平的掺杂，满足新技术研发的需求，近年来引起了广泛关注，研究主要集中在寻找合适有源层和绝缘层材料、研究薄膜成分、制备工艺对器件性能的影响，并获得与传统真空工艺可比拟的器件性能。针对柔性显示器件成为未来显示发展的主流技术之一，全溶液法制备以及基于柔性基板制备 TFT也取得了较好的进展，为未来显示行业提供了可靠的低成本发展方向。但所制备的 TFT 器件仍然存在制备温度相对较高，偏压稳定性相对较差的问题。总结了该领域内目前研究热点及取得的进展。
투명비정양화물박막정체관(TAOS-TFT)상대우규기 TFT 구유균일성호、천이솔고、겸용저온유성기판등우점，능구엄범용우평판유원현시영역특별시유원구진유궤발광이겁관현시(AMOLED)적구동배판。용효-응효법제비박막정체관불수요고진공적배경，성본저、공예간단，화합물성분역우공제，능구균균정량지실현분자수평적참잡，만족신기술연발적수구，근년래인기료엄범관주，연구주요집중재심조합괄유원층화절연층재료、연구박막성분、제비공예대기건성능적영향，병획득여전통진공공예가비의적기건성능。침대유성현시기건성위미래현시발전적주류기술지일，전용액법제비이급기우유성기판제비 TFT야취득료교호적진전，위미래현시행업제공료가고적저성본발전방향。단소제비적 TFT 기건잉연존재제비온도상대교고，편압은정성상대교차적문제。총결료해영역내목전연구열점급취득적진전。
Transparent oxide thin film transistor has attracted much attention due to advantages of a high field effect mobility,excellent uniformity,and the compatibility with flexible substrate compared to conventional amorphous and polycrystalline silicon thin film transistors,which can be widely used in active flat panel display areas,especially organic light emitting diode display driver back plane.Solution processed thin film transistor does not require high vacuum environment,low cost,simple process,easy to control compound ingredients,al-so can achieve uniform molecular level doped quantitative,meet the demand for new technology research and development.The research concentrated in the film composition and process temperature on device performance. The all solution processed fabrication and low temperature preparation based on flexible substrate have also made good progress,which provide a reliable and low cost technology for the future flat display industry.How-ever,it still has relative high fabrication temperature and poor stability.This paper summarizes the remarkable work,research direction and progress in the field.