CAJ | 학술논문

为针对提高太赫兹波透射率的需求，开展基于离子注入表面改性的脆性材料微结构超精密加工技术的研究，并将其应用于太赫兹波产生用磷化镓微棱锥结构的应用中。通过蒙特卡洛模拟指导注入参数，对比脆塑转变深度验证机械加工效果，成功加工出符合应用要求的微结构。通过光学测试，该方法能够有效提高加工效率，改善加工质量，实现对脆性光学材料的一次成型加工。
위침대제고태혁자파투사솔적수구，개전기우리자주입표면개성적취성재료미결구초정밀가공기술적연구，병장기응용우태혁자파산생용린화가미릉추결구적응용중。통과몽특잡락모의지도주입삼수，대비취소전변심도험증궤계가공효과，성공가공출부합응용요구적미결구。통과광학측시，해방법능구유효제고가공효솔，개선가공질량，실현대취성광학재료적일차성형가공。
Aiming at carrying out research on single-point diamond fly-cutting using ion implantation surface modification method and its application to terahertz antireflection micro-pyramid structures on GaP crystals. Monte Carlo simulation was conducted to guide the actual implantation experiments for the optimization of surface modification results. Taper cutting was used to verify the enhancement of mechanical properties of the modified material. Actual GaP micro-pyramid structures were designed, machined and tested. By testing, it can be concluded that the method can improve manufacturing efficiency and surface quality of brittle optical materials in one machining process.