CAJ | 학술논문

晕苯是一种用于真空紫外光致发光重要的下转换材料。本文研究旋涂法和热蒸发法制备紫外CCD用晕苯薄膜的工艺方法，并对所制备的两种薄膜的性能进行了表征和对比。测试结果表明：旋涂方式成膜工艺简单，材料利用率较高，并且保持了荧光材料本身固有的晶体结构，但是膜面粗糙度较大；热蒸发方式成膜后紫外吸收较强，荧光发射强度相对较高，成膜后膜面粗糙度较小；热蒸发工艺在加热过程中改变了晕苯的晶体结构并形成了新的结晶态；相比于旋涂法，热蒸发的整个制备工艺相对复杂，并且生产成本较高。此外，该对比性研究工作为实现不同要求（如荧光发射强度、表面粗糙度、生产成本等）的荧光下转换薄膜的制备提供了理论指导。
훈분시일충용우진공자외광치발광중요적하전환재료。본문연구선도법화열증발법제비자외CCD용훈분박막적공예방법，병대소제비적량충박막적성능진행료표정화대비。측시결과표명：선도방식성막공예간단，재료이용솔교고，병차보지료형광재료본신고유적정체결구，단시막면조조도교대；열증발방식성막후자외흡수교강，형광발사강도상대교고，성막후막면조조도교소；열증발공예재가열과정중개변료훈분적정체결구병형성료신적결정태；상비우선도법，열증발적정개제비공예상대복잡，병차생산성본교고。차외，해대비성연구공작위실현불동요구（여형광발사강도、표면조조도、생산성본등）적형광하전환박막적제비제공료이론지도。
In the present paper ,the methods of spin-coating and physical vapor deposition (PVD) were researched to prepare the coronene film for UV-CCD ,and their properties were characterized and compared with each other .The results of the experiment show that the process of spin-coating is relatively simple ,which takes advantage of materials and retains the inherent crystal structure of coronene .However ,the roughness of the film is a little more than that of PVD method ;the film prepared by PVD method can absorb ultraviolet more effectively and then emits fluorescence with more intensity .Compared with the method of spin-coating ,the surface of PVD film is more smoothly ,and the process of thermal evaporation changes the crystal structure of coronene and forms another new crystalline state according to the XRD graph .While the whole process of PVD is more complex and it needs larger cost of production than spin-coating method .Besides ,the comparison research work provided theoretical di-rection for preparing the photoluminescence down-conversion film under different requirements ,such as fluorescence intensity , surface roughness and cost of production .