CAJ | 학술논문

基于传输线理论提出了测试磁性薄膜复数磁导率的短路微带线法，利用磁性薄膜标准 Lorentzian形式的复数磁导率频谱验证了短路微带线法的正确性。结果表明，短路微带线法在 DC~5GHz 的频率范围内具有较高的精确性。同时设计和制作了DC~5GHz的测试夹具，用其测试了NiFe磁性薄膜的复数磁导率并用标准Lorentzian形式磁谱对测试结果进行数据拟合。结果表明，从所设计的微带夹具测得的S11能够较为精确地获得磁性薄膜的复数磁导率。最后分析了该测试方法的测试误差来源。
기우전수선이론제출료측시자성박막복수자도솔적단로미대선법，이용자성박막표준 Lorentzian형식적복수자도솔빈보험증료단로미대선법적정학성。결과표명，단로미대선법재 DC~5GHz 적빈솔범위내구유교고적정학성。동시설계화제작료DC~5GHz적측시협구，용기측시료NiFe자성박막적복수자도솔병용표준Lorentzian형식자보대측시결과진행수거의합。결과표명，종소설계적미대협구측득적S11능구교위정학지획득자성박막적복수자도솔。최후분석료해측시방법적측시오차래원。
The shorted microstrip method is proposed to test complex permeability of magnetic film based on transmission line theory, and was verified by using standard Lorentzian form complex permeability spectrum of magnetic thin film. The results show that the shorted microstrip method exhbits a high accuracy in DC-5GHz frequency range. A DC-5GHz test fixture was designed and fabricated,and was used to measure the complex permeability of NiFe magnetic thin film and the test tesults was fitted by standard Lorentzian form permeability spectrum. The results show that the test fixture can be used to extract the accurated permeability of the film from the measurement of S11. Also, possible error sources of the method were discussed.