CAJ | 학술논문

设计制作了一种高音质电磁微机电系统（MEMS）扬声器，该结构由悬臂梁支撑的硅基薄膜、固定在硅基薄膜上的钐钴磁体以及制作在PCB板上的铜线圈组成。扬声器微结构利用体微加工工艺制作，微梁支撑的硅基薄膜刚度较大，在音频范围内只有三个振动模态，远少于传统电磁式微扬声器使用的聚合物薄膜振动模态数，减少了尖声信号出现，提高了声音的质量。悬臂梁结构可以提供较大的振动幅度以及很好的振动线性度，从而获得更高的声压。扬声器结构硅基薄膜直径1mm，厚度25μm，悬臂梁宽度20μm，厚度25μm，具有音质好、声压大的特点。
설계제작료일충고음질전자미궤전계통（MEMS）양성기，해결구유현비량지탱적규기박막、고정재규기박막상적삼고자체이급제작재PCB판상적동선권조성。양성기미결구이용체미가공공예제작，미량지탱적규기박막강도교대，재음빈범위내지유삼개진동모태，원소우전통전자식미양성기사용적취합물박막진동모태수，감소료첨성신호출현，제고료성음적질량。현비량결구가이제공교대적진동폭도이급흔호적진동선성도，종이획득경고적성압。양성기결구규기박막직경1mm，후도25μm，현비량관도20μm，후도25μm，구유음질호、성압대적특점。
An electromagnetic micro-electromechanical systems(MEMS)microspeaker was designed and fabricated, which is composed of a silicon-based membrane suspended by cantilever beams, stacked Sm2Co17 permanent magnet and a copper coil on a PCB board. The bulk micromachined device structure with silicon membrane using shows higher rigidity and better acoustic behavior compared with conventional devices with flexible polymer membranes, and for example, only 3 vibration modes appear in the audio range, improving the quality of the sound. Large vibration amplitude and good vibration linearity provided by the cantilever structure make the structure has a higher sound pressure. Consequently, the structure has the characteristics of better sound quality and higher sound pressure. The diameter of silicon membrane and the width of the cantilever beam are 1mm and 20μm, respectively, and they have the same thickness of 25μm.