CAJ | 학술논문

为进一步改善大型固体激光器3倍频用薄膜的光学及损伤特性，利用不同的测试方法系统对比研究了电子束蒸发方式制备的几种紫外薄膜的光学常数、晶体结构、表面粗糙度以及弱吸收和其激光损伤特性间的相互关系。研究表明：薄膜的弱吸收和其禁带宽度共同制约了其激光损伤阈值，而薄膜因晶相结构的产生而增大的表面粗糙度对其激光损伤阈值无影响。大弱吸收的薄膜其损伤表现为非常微小的吸收点向外扩张构成的较大的破坏点，而低弱吸收的薄膜其损伤则表现为瞬间吸收引起大的损伤。
위진일보개선대형고체격광기3배빈용박막적광학급손상특성，이용불동적측시방법계통대비연구료전자속증발방식제비적궤충자외박막적광학상수、정체결구、표면조조도이급약흡수화기격광손상특성간적상호관계。연구표명：박막적약흡수화기금대관도공동제약료기격광손상역치，이박막인정상결구적산생이증대적표면조조도대기격광손상역치무영향。대약흡수적박막기손상표현위비상미소적흡수점향외확장구성적교대적파배점，이저약흡수적박막기손상칙표현위순간흡수인기대적손상。
For further improvement of optical and laser induced damage properties of the thin films equipped on three harmonic of YAG laser system, different test methods were used to analysis the correlations between optical constant, crystalline structures, surface roughness, weak absorption and laser induced damage threshold of several thin films fabricated by reactive electron beam deposition process with different ultraviolet materials. The weak absorption and the bandgap limited the laser-induced damage threshold, rather than the surface roughness increased by the appearance of crystalline structures. Two laser damage processes were observed as that in higher weak absorption material, small damage expanded step by step when it absorbed the pulse laser energy, while in lower weak absorption material, a sudden damage occurred when the absorbed laser energy were higher enough.