CAJ | 학술논문

为了分析阵列设计参数与成像效果的关系,提高微电容超声传感器( CMUT)阵列设计的可靠性,提出了一种仿真CMUT阵列水下成像方法。设计了一种CMUT结构,振膜厚3μm,振动单元边长1.16 mm,ANSYS仿真得出中心频率为464 kHz。讨论了阵列参数与声束指向性关系,以空间脉冲响应理论为基础提出了一种可显示CMUT阵列成像效果图的仿真设计方法。通过MATLAB对该方法的仿真,模拟了不同结构的CMUT线阵在不同激励形式下的水下成像。仿真结果表明,64阵元且阵元中心距0.5λ的CMUT线阵在单脉冲激励下成像效果最好。该仿真方法的实验结果与理论一致,且相比单纯理论分析该方法结论更直观,考虑成像影响因素更全面。
위료분석진렬설계삼수여성상효과적관계,제고미전용초성전감기( CMUT)진렬설계적가고성,제출료일충방진CMUT진렬수하성상방법。설계료일충CMUT결구,진막후3μm,진동단원변장1.16 mm,ANSYS방진득출중심빈솔위464 kHz。토론료진렬삼수여성속지향성관계,이공간맥충향응이론위기출제출료일충가현시CMUT진렬성상효과도적방진설계방법。통과MATLAB대해방법적방진,모의료불동결구적CMUT선진재불동격려형식하적수하성상。방진결과표명,64진원차진원중심거0.5λ적CMUT선진재단맥충격려하성상효과최호。해방진방법적실험결과여이론일치,차상비단순이론분석해방법결론경직관,고필성상영향인소경전면。
In order to analyze the influence of design parameters on imaging results and improve the reliability of design of the capacitance micromachined ultrasonic transducer( CMUT) linear array,a simulation method is proposed for underwater imaging of the CMUT array. A new structure of CMUT is designed with a diaphragm, thickness of 3 μm,and 1. 16 mm for the side length, and the center frequency is simulated with ANSYS as 464 kHz. The relationship between parameters and the beam directivity is discussed. Based on the spatial impulse response theory, the simulation method which can display the imaging result of designed CMUT array is presented. Finally, the imaging simulation of this method is proceeded on MATLAB, and an optimal result is given by the CMUT linear array with 64 elements and 0. 5λ for the spacing under monopulse excitation. For the CMUT linear array with different element number and element spacing, the imaging result of this method is in accordance with the conclusion of directivity theory,but more intuitive and comprehensive on imaging analysis.