CAJ | 학술논문

以提高PSD输出微弱电流信号的稳定性和精度为目的,讨论了PSD驱动、运放电路的设计。主要考虑因素包括：两级精密运放选择,电源滤波模块设计,PCB设计中数模抗干扰,电源和地的处理,抗环境光干扰,PSD及其运放电路集成化,以及适应不同漫反射性质的被测物体的多路放大倍数设计等。最后,区别于传统的测量方案,采用一种基于标定测量的方法。通过音叉振动波形和定点距离测量实验,验证了PSD微位移测量系统的稳定性和精度都较好,测量范围20 mm,位移测量相对精度达到1.01%。<br>　　以提高PSD输出微弱电流信号的稳定性和精度为目的,讨论了PSD驱动、运放电路的设计。主要考虑因素包括：两级精密运放选择,电源滤波模块设计,PCB设计中数模抗干扰,电源和地的处理,抗环境光干扰,PSD及其运放电路集成化,以及适应不同漫反射性质的被测物体的多路放大倍数设计等。最后,区别于传统的测量方案,采用一种基于标定测量的方法。通过音叉振动波形和定点距离测量实验,验证了PSD微位移测量系统的稳定性和精度都较好,测量范围20 mm,位移测量相对精度达到1.01%。
이제고PSD수출미약전류신호적은정성화정도위목적,토론료PSD구동、운방전로적설계。주요고필인소포괄：량급정밀운방선택,전원려파모괴설계,PCB설계중수모항간우,전원화지적처리,항배경광간우,PSD급기운방전로집성화,이급괄응불동만반사성질적피측물체적다로방대배수설계등。최후,구별우전통적측량방안,채용일충기우표정측량적방법。통과음차진동파형화정점거리측량실험,험증료PSD미위이측량계통적은정성화정도도교호,측량범위20 mm,위이측량상대정도체도1.01%。<br>　　이제고PSD수출미약전류신호적은정성화정도위목적,토론료PSD구동、운방전로적설계。주요고필인소포괄：량급정밀운방선택,전원려파모괴설계,PCB설계중수모항간우,전원화지적처리,항배경광간우,PSD급기운방전로집성화,이급괄응불동만반사성질적피측물체적다로방대배수설계등。최후,구별우전통적측량방안,채용일충기우표정측량적방법。통과음차진동파형화정점거리측량실험,험증료PSD미위이측량계통적은정성화정도도교호,측량범위20 mm,위이측량상대정도체도1.01%。
In order to improve the stability and precision of position sensitive device ( PSD ) output feeble current signal,this paper discusses the design of PSD drive and op-amp circuit. Main considerations include the selection of two levels precision op-amp,the design of power filtering module,digital analog anti-interference design in PCB, handling of power supply and ground,anti-interference of ambient light,the PSD and the op-amp integrated circuits, and the design of multi-channel magnification to adapt the different diffuse nature of the object to be tested,etc. In the end,different from traditional measurement scheme,this paper adopts a new method based on calibration meas-urement. By measuring the vibration waveform of tuning fork and fixed-point distance,it verifies that the stability and precision of the PSD tiny displacement measuring system is very good,and the measuring range is 20 mm,the displacement relative accuracy is up to 1 . 01%.