应用光学
應用光學
응용광학
JOURNAL OF APPLIED OPTICS
2014年
3期
446-451
,共6页
吴丽翔%刘颖%饶欢乐%邱克强%付绍军
吳麗翔%劉穎%饒歡樂%邱剋彊%付紹軍
오려상%류영%요환악%구극강%부소군
光栅占宽比%俯视SEM图像%动态规划%最小二乘样条逼近
光柵佔寬比%俯視SEM圖像%動態規劃%最小二乘樣條逼近
광책점관비%부시SEM도상%동태규화%최소이승양조핍근
grating duty cycle%top-down SEM image%dynamic programming%least-squares spline approximation
提出了一种利用俯视SEM 图像检测矩形光栅占宽比的新方法。对目标检测图像进行灰度轮廓预处理,接着进行基于动态规划和最小二乘样条逼近的边缘检测,最后按照设定的量化评价标准,计算出目标区域内的光栅占宽比的平均值和标准偏差。使用该方法不仅可以快速准确地计算出目标区域内的光栅占宽比和量化评价占宽比空间分布均匀性,也避免了具有破坏性的制样过程,弥补了传统断面测量方法的不足。编写了用于矩形光栅占宽比检测的图像处理软件GradUI。使用此软件对一组1200线/mm矩形光栅的俯视SEM 图像进行检测分析,发现平均占宽比与灰度轮廓估算值的均方根偏差为0.0173。结果表明,基于俯视SEM 图像的矩形光栅占宽比检测方法是有效可行的,同时,也验证了软件的可靠性。
提齣瞭一種利用俯視SEM 圖像檢測矩形光柵佔寬比的新方法。對目標檢測圖像進行灰度輪廓預處理,接著進行基于動態規劃和最小二乘樣條逼近的邊緣檢測,最後按照設定的量化評價標準,計算齣目標區域內的光柵佔寬比的平均值和標準偏差。使用該方法不僅可以快速準確地計算齣目標區域內的光柵佔寬比和量化評價佔寬比空間分佈均勻性,也避免瞭具有破壞性的製樣過程,瀰補瞭傳統斷麵測量方法的不足。編寫瞭用于矩形光柵佔寬比檢測的圖像處理軟件GradUI。使用此軟件對一組1200線/mm矩形光柵的俯視SEM 圖像進行檢測分析,髮現平均佔寬比與灰度輪廓估算值的均方根偏差為0.0173。結果錶明,基于俯視SEM 圖像的矩形光柵佔寬比檢測方法是有效可行的,同時,也驗證瞭軟件的可靠性。
제출료일충이용부시SEM 도상검측구형광책점관비적신방법。대목표검측도상진행회도륜곽예처리,접착진행기우동태규화화최소이승양조핍근적변연검측,최후안조설정적양화평개표준,계산출목표구역내적광책점관비적평균치화표준편차。사용해방법불부가이쾌속준학지계산출목표구역내적광책점관비화양화평개점관비공간분포균균성,야피면료구유파배성적제양과정,미보료전통단면측량방법적불족。편사료용우구형광책점관비검측적도상처리연건GradUI。사용차연건대일조1200선/mm구형광책적부시SEM 도상진행검측분석,발현평균점관비여회도륜곽고산치적균방근편차위0.0173。결과표명,기우부시SEM 도상적구형광책점관비검측방법시유효가행적,동시,야험증료연건적가고성。
A novel method to measure duty cycles of rectangular gratings and evaluate the spa-tial uniformity of duty cycles was presented on the basis of top-down scanning electron micro-scope(SEM ) images .This method first conducts image grayscale profile preprocessing on tar-get images ,then performs border detection based on dynamic programming and least-squares spline approximation ,and finally computes the mean and standard deviations of duty cycles in the target area in light of the provided evaluation standards .Using this method ,we can not only quickly and accurately measure grating duty cycles and perform quantitative analysis on the spatial uniformity of duty cycles , but also avoid damaging sample preparation process , w hich greatly make up the deficiency of traditional method .A top-dow n SEM image processing software ,GradUI ,for detecting duty cycles of rectangular gratings was developed .The top-down SEM images of several 1 200 lines/mm self-made gratings were processed with the soft-ware ,and the root-mean-square deviation of the average duty cycle and the estimated value was 0 .017 3 .T he results show that the approach to calculate duty cycles based on top-dow n SEM images is feasible and of high efficiency ,and the software is robust .