CAJ | 학술논문

鉴于不锈钢化学机械抛光的复杂环境，研究了其抛光过程中温度的变化规律。设计并搭建了过程温度在线检测系统，检测并研究了不同工艺参数与温度之间的关系。实验结果表明：抛光温度随着抛光压力和抛光垫转速的增大而增大，随着抛光液流量的增大而减小。不锈钢基板边缘点抛光温度高于中心点抛光温度，聚氨酯材料比合成革和磨砂革材料的温升更大。当抛光垫加沟槽时，温升将明显下降，且径向型与周向型沟槽温度变化相差不大，网格型沟槽温差变化最小。抛光垫沟槽间距增大，温升增大；沟槽宽度对温升影响较小。
감우불수강화학궤계포광적복잡배경，연구료기포광과정중온도적변화규률。설계병탑건료과정온도재선검측계통，검측병연구료불동공예삼수여온도지간적관계。실험결과표명：포광온도수착포광압력화포광점전속적증대이증대，수착포광액류량적증대이감소。불수강기판변연점포광온도고우중심점포광온도，취안지재료비합성혁화마사혁재료적온승경대。당포광점가구조시，온승장명현하강，차경향형여주향형구조온도변화상차불대，망격형구조온차변화최소。포광점구조간거증대，온승증대；구조관도대온승영향교소。
Based on complex environment and temperature variation tendency during chemical mechanical polishing of the stainless steel substrate process temperature measurement system is designed and built The relationship between temperature and polishing parameter are obtained by experiments Results show that the temperature increases with the increase of polishing pressure and rotation speed of polishing pad but decreases with the increase of polishing solution rate The temperature near the edge of the surface is higher than that near the center Temperature increase on polyurethane pad is larger than those on synthetic leather and nubuck leather and temperature will fall significantly when there are grooves on the pad However there is no big difference between temperature increases of radical and circumferential grooves while grid groove has the smallest temperature changes Temperature increase becomes larger as the distance between grooves increases but the effect is relatively weak.