电镀与涂饰
電鍍與塗飾
전도여도식
ELECTROPLATING & FINISHING
2014年
7期
296-298
,共3页
触控面板%铜布线薄膜%聚对苯二甲酸乙二酯%磁控溅射%电镀铜%光刻%表面电阻
觸控麵闆%銅佈線薄膜%聚對苯二甲痠乙二酯%磁控濺射%電鍍銅%光刻%錶麵電阻
촉공면판%동포선박막%취대분이갑산을이지%자공천사%전도동%광각%표면전조
touch panel%copper wiring film%polyethylene terephthalate%magnetron sputtering%copper electroplating%photolithography%surface resistance
介绍了一种高透光、电阻小，可用于触摸面板大型化的透明导电性薄膜的制造工艺，即在 PET(聚对苯二甲酸乙二酯)薄膜上形成肉眼不可见的铜网。其工艺流程主要包括低温等离子体表面清洗，磁控溅射Ni-Cr过渡层及Cu植晶层，硫酸盐镀铜层，光刻。所得铜布线薄膜的性能超过了一般ITO(氧化铟锡)膜的性能。
介紹瞭一種高透光、電阻小，可用于觸摸麵闆大型化的透明導電性薄膜的製造工藝，即在 PET(聚對苯二甲痠乙二酯)薄膜上形成肉眼不可見的銅網。其工藝流程主要包括低溫等離子體錶麵清洗，磁控濺射Ni-Cr過渡層及Cu植晶層，硫痠鹽鍍銅層，光刻。所得銅佈線薄膜的性能超過瞭一般ITO(氧化銦錫)膜的性能。
개소료일충고투광、전조소，가용우촉모면판대형화적투명도전성박막적제조공예，즉재 PET(취대분이갑산을이지)박막상형성육안불가견적동망。기공예류정주요포괄저온등리자체표면청세，자공천사Ni-Cr과도층급Cu식정층，류산염도동층，광각。소득동포선박막적성능초과료일반ITO(양화인석)막적성능。
A method for producing a transparent and conductive film with high light transmission and low resistance used in large-size touch panel was introduced. Copper mesh which is invisible to the eyes is formed on a PET thin film by the following steps:(1) cleaning the surface with low-temperature plasma;(2) magnetron sputtering with Ni-Cr intermediate layer and Cu seed layer; (3) electroplating Cu in a sulfate bath;and (4) photolithography. The copper wiring film obtained has superior performance than a common ITO film.
