CAJ | 학술논문

本文提出采用基于频谱校正技术的增强型频域光学相干层析系统(EOCT)及其在非接触结构振动和热变形检测的应用.该 EOCT系统采用基于CCD的宽带光谱仪以及宽带低相干的白光，所以这个增强型光学相干层析系统具有很高的检测分辨率，可达到0.9μm精度.但是，由于光谱信号作傅里叶变换的过程中产生了能量泄露，从而导致振动或热变形检测存在一定程度的误差.为了解决这个问题，本文提出采用一种频谱校正技术来校正此误差.从振动、热变形以及压电驱动器标定等实验的结果可知该方法的检测精度最高可达0.1μm.因此，自研制的EOCT系统在非接触振动、热变形测量以及压电驱动器在线标定等领域具有很好的应用前景.
본문제출채용기우빈보교정기술적증강형빈역광학상간층석계통(EOCT)급기재비접촉결구진동화열변형검측적응용.해 EOCT계통채용기우CCD적관대광보의이급관대저상간적백광，소이저개증강형광학상간층석계통구유흔고적검측분변솔，가체도0.9μm정도.단시，유우광보신호작부리협변환적과정중산생료능량설로，종이도치진동혹열변형검측존재일정정도적오차.위료해결저개문제，본문제출채용일충빈보교정기술래교정차오차.종진동、열변형이급압전구동기표정등실험적결과가지해방법적검측정도최고가체0.1μm.인차，자연제적EOCT계통재비접촉진동、열변형측량이급압전구동기재선표정등영역구유흔호적응용전경.
An enhanced Fourier-domain optical coherence tomography(EOCT)based on spectrum correction technique is developed and employed in non-contact measurement of structural vibration and thermal deformation,and real-time calibration of PZT actuators.The EOCT system used a broadband CCD-based spectrometer and a short-coherence white light source.Due to the broadband of the spectrometer and light source,the system provided high robust performance with an excellent measurement resolution of 0.9 μm.Because of the energy leakage effect of FFT,a spectrum correction technique was employed to enhance the resolution of the EOCT system.The detection resolution for vibration and thermal deformation measurement could be up to 0.1 μm.From the experimental results,the self-developed EOCT has great potential applications in non-contact structural vibration,thermal deformation measurement,and real-time calibration of PZT actuators.