深圳职业技术学院学报
深圳職業技術學院學報
심수직업기술학원학보
JOURNAL OF SHENZHEN POLYTECNIC
2012年
3期
51-54
,共4页
(Ti,%A1)N%电弧离子镀%N2分压
(Ti,%A1)N%電弧離子鍍%N2分壓
(Ti,%A1)N%전호리자도%N2분압
(Ti,A1) N%arc ion plating%nitrogen partial pressure
采用电弧离子镀工艺，调节N2分压制备了系列（Ti，A1）N硬质涂层，研究了不同N2分压对涂层表面形貌、相结构、成分及力争性能的影响．结果表明，当氮气分压较低时，涂层金属相含量较高，涂层硬度和残余应力较低，膜／基结合力较高，涂层耐磨性较差；当氮气分压较高时，涂层氮化物相含量较高，涂层硬度和残余应力较高，膜／基结合力偏低，涂层耐磨性很强．
採用電弧離子鍍工藝，調節N2分壓製備瞭繫列（Ti，A1）N硬質塗層，研究瞭不同N2分壓對塗層錶麵形貌、相結構、成分及力爭性能的影響．結果錶明，噹氮氣分壓較低時，塗層金屬相含量較高，塗層硬度和殘餘應力較低，膜／基結閤力較高，塗層耐磨性較差；噹氮氣分壓較高時，塗層氮化物相含量較高，塗層硬度和殘餘應力較高，膜／基結閤力偏低，塗層耐磨性很彊．
채용전호리자도공예，조절N2분압제비료계렬（Ti，A1）N경질도층，연구료불동N2분압대도층표면형모、상결구、성분급력쟁성능적영향．결과표명，당담기분압교저시，도층금속상함량교고，도층경도화잔여응력교저，막／기결합력교고，도층내마성교차；당담기분압교고시，도층담화물상함량교고，도층경도화잔여응력교고，막／기결합력편저，도층내마성흔강．
Effects of N2 partial pressure on composition, structure and mechanical properties in （Ti, A1）N coatings by arc ion plating （/kiP）, were systematically investigated. The results indicate that, when N2 partial pressure increases from 0.2Pa to 0.8Pa, metal phase of （Ti, A1）N coating reduces and nitride phase increases, hardness and residual stress of the coating increase, film/substrate adhesion strength decreases and abrasive resistance of the coating improves.
