电子质量
電子質量
전자질량
ELECTRONICS QUALITY
2014年
3期
1-8,13
,共9页
VDMOS工艺平台%元胞%主结%终端结构%分压环%场板%空间电荷区%PN结%EAS
VDMOS工藝平檯%元胞%主結%終耑結構%分壓環%場闆%空間電荷區%PN結%EAS
VDMOS공예평태%원포%주결%종단결구%분압배%장판%공간전하구%PN결%EAS
The technology platform of VDMOS%Cel%Main junction%Terminal structure%Field limiting ring%Field plate%Space charge region%PN junction%EAS (Energy Avalanche Stress)
该文从国内生产线的实际出发，简单介绍了目前国内主流功率VDMOS器件生产厂家所采用的平面高压VDMOS工艺平台，初步总结了当前各种成熟工艺平台具有的特点与优点，希望该文有助于国内同行之间相互借鉴与提高，目的是促进民族工业不断向前发展。
該文從國內生產線的實際齣髮，簡單介紹瞭目前國內主流功率VDMOS器件生產廠傢所採用的平麵高壓VDMOS工藝平檯，初步總結瞭噹前各種成熟工藝平檯具有的特點與優點，希望該文有助于國內同行之間相互藉鑒與提高，目的是促進民族工業不斷嚮前髮展。
해문종국내생산선적실제출발，간단개소료목전국내주류공솔VDMOS기건생산엄가소채용적평면고압VDMOS공예평태，초보총결료당전각충성숙공예평태구유적특점여우점，희망해문유조우국내동행지간상호차감여제고，목적시촉진민족공업불단향전발전。
Proceeding from actual conditions of the domestic chip manufacturing product line,Mainstream manufacturers of power VDMOS,and the technology platform of high voltage planar VDMOS were intro-duced in the article.Its features and advantages of the the current mature technology platform were sum-marized primarily,we hoped that this article helps domestic counterparts to learn from each other and to make progress,with the purpose of promoting the continuous development of national industry.
