机械制造与自动化
機械製造與自動化
궤계제조여자동화
JIANGSU MACHINE BUILDING & AUTOMATION
2014年
2期
163-166
,共4页
光栅%超声%辅助
光柵%超聲%輔助
광책%초성%보조
ultrasound-assisted%UV-LIGA%grating preparation
光栅在通信、光存储及光谱分析领域具有广泛的应用。对超声辅助UV-LIGA技术制备光栅的可行性进行了试验研究。试验中两次利用超声的特殊效应,实现不同的辅助功能。1)采用超声辅助显影,通过改善光刻胶模沟槽内的物质传输,提高光刻胶模结构的显影效率和显影质量。2)在后烘之后、显影之前对光刻胶结构进行超声处理,通过在空气中对光刻胶模结构进行超声处理,有效降低SU-8胶模在电铸过程中的溶胀。选取优化的工艺参数,采用侧向冲液电铸方式,获得了镍基光栅。
光柵在通信、光存儲及光譜分析領域具有廣汎的應用。對超聲輔助UV-LIGA技術製備光柵的可行性進行瞭試驗研究。試驗中兩次利用超聲的特殊效應,實現不同的輔助功能。1)採用超聲輔助顯影,通過改善光刻膠模溝槽內的物質傳輸,提高光刻膠模結構的顯影效率和顯影質量。2)在後烘之後、顯影之前對光刻膠結構進行超聲處理,通過在空氣中對光刻膠模結構進行超聲處理,有效降低SU-8膠模在電鑄過程中的溶脹。選取優化的工藝參數,採用側嚮遲液電鑄方式,穫得瞭鎳基光柵。
광책재통신、광존저급광보분석영역구유엄범적응용。대초성보조UV-LIGA기술제비광책적가행성진행료시험연구。시험중량차이용초성적특수효응,실현불동적보조공능。1)채용초성보조현영,통과개선광각효모구조내적물질전수,제고광각효모결구적현영효솔화현영질량。2)재후홍지후、현영지전대광각효결구진행초성처리,통과재공기중대광각효모결구진행초성처리,유효강저SU-8효모재전주과정중적용창。선취우화적공예삼수,채용측향충액전주방식,획득료얼기광책。
The grating is widely used in the fields of communication, optical storage and spectroscopy. In this paper, the experiment of grating preparation by ultrasonic-assisted UV-LIGA is conducted. Different auxiliary functions are realized by using special ultrason-ic effects twice. Firstly, the ultrasonic-assisted process is used to improve the substances transmission in the photoresist mold groove, the developing efficiency and quality. Secondly, the ultrasonic-assisted developing is introduced between the processes of post-baking and developing, and the structure of photoresist mold is subjected to the ultrasonic treatment in the air, then the swel ing of plastic mold of SU-8 is reduced evidently in the electroforming process. The process parameters are optimized and the lateral red liquid electroforming way is adopted. Final y, a thickness of 65μm nickel based grating is successful y prepared.