黑龙江八一农垦大学学报
黑龍江八一農墾大學學報
흑룡강팔일농은대학학보
JOURNAL OF HEILONGJIANG AUGUST FIRST LAND RECLAMATION UNIVERSITY
2012年
2期
16-19,26
,共5页
张燕梁%戈超%张俊秋%贾凡%马荣峰
張燕樑%戈超%張俊鞦%賈凡%馬榮峰
장연량%과초%장준추%가범%마영봉
磁控溅射%耐冲蚀%钛合金
磁控濺射%耐遲蝕%鈦閤金
자공천사%내충식%태합금
magnetron sputter%erosion resistance%titanium alloy
介绍了磁控溅射的基本原理,以及几种典型的磁控溅射镀膜技术(反应溅射、非平衡磁控溅射、等离子体加强磁控溅射技术);并介绍了利用磁控溅射技术制备钛合金耐冲蚀涂层的新进展。
介紹瞭磁控濺射的基本原理,以及幾種典型的磁控濺射鍍膜技術(反應濺射、非平衡磁控濺射、等離子體加彊磁控濺射技術);併介紹瞭利用磁控濺射技術製備鈦閤金耐遲蝕塗層的新進展。
개소료자공천사적기본원리,이급궤충전형적자공천사도막기술(반응천사、비평형자공천사、등리자체가강자공천사기술);병개소료이용자공천사기술제비태합금내충식도층적신진전。
In this paper,the basic concept of magnetron sputtering method was reviewed and several typical magnetron sputtering technology such as reactive magnetron sputtering,unbalanced magnetron sputtering and plasma enhanced magnetron sputtering was described. Recent progress in research on erosion resistance titanium alloy composite coatings deposited by magnetron sputtering method was summarized.