CAJ | 학술논문

利用吉布斯自由能理论对西门子体系进行了热力学分析，梳理了体系中可能发生的系列化学反应。结果表明，多晶硅生产主反应为裂解反应而非还原，SiHCl3裂解生成SiCl2（g）和HCl（g），进而生成si和SiCl2（g）。这不仅合理地解释了实际生产中副产大量四氯化硅等问题，而且为优化还原工艺提供了有价值的科学依据。
이용길포사자유능이론대서문자체계진행료열역학분석，소리료체계중가능발생적계렬화학반응。결과표명，다정규생산주반응위렬해반응이비환원，SiHCl3렬해생성SiCl2（g）화HCl（g），진이생성si화SiCl2（g）。저불부합리지해석료실제생산중부산대량사록화규등문제，이차위우화환원공예제공료유개치적과학의거。
The thermodynamic analysis of Siemens system are carried out in detail with the method of Gibbs Free Energy theory, and a series of chemical reactions may occur in the system are hackled. The result shows that the main reactions of polysilicon production is decomposition reaction instead of reduc- tion, SiHCl3 splitting generation SICl2（g）＋ HCl（g） ,and then generate Si and SiCl4 （g）. This not only reasonably used to explain amount of silicon tetrachloride by - product in actual production but also pro- vide scientific evidence for optimizing the reduction technology.