CAJ | 학술논문

石墨加热器作为多晶硅铸锭工艺中的热源,它的尺寸和位置直接影响了多晶硅晶体生长过程中的温度分布和固液界面。通过对顶加热器、侧加热器以及顶-侧加热器三种不同的加热器的热场模拟研究,计算结果表明：目前采用的顶-侧加热器在多晶硅熔融和晶体生长过程中能够获得较好的效率和固液界面。
석묵가열기작위다정규주정공예중적열원,타적척촌화위치직접영향료다정규정체생장과정중적온도분포화고액계면。통과대정가열기、측가열기이급정-측가열기삼충불동적가열기적열장모의연구,계산결과표명：목전채용적정-측가열기재다정규용융화정체생장과정중능구획득교호적효솔화고액계면。
Graphite heater is the only heat source during the multi-crystalline silicon ingot casting process, And the temperature field of the solid-liquid interface is affected by the size and position of graphite heater. Three different graphite heaters were studied. The results show that the lateral and vertical heater produces the better shape of the solid-liquid phase boundary and the casting process has better efficiency.