CAJ | 학술논문

为了形象演示＂集成电路工艺原理＂课程中的各向异性湿法腐蚀,笔者指导学生设计了一组（100）硅片上以SiO2正方薄膜为掩膜的腐蚀实验。学生自主配置KOH了溶液,改变水浴温度进行各向异性腐蚀实验,并利用金相显微镜对样品实时观察并测量。学生在动手过程中可以理解各向异性相关工艺,加强了教学效果。
위료형상연시＂집성전로공예원리＂과정중적각향이성습법부식,필자지도학생설계료일조（100）규편상이SiO2정방박막위엄막적부식실험。학생자주배치KOH료용액,개변수욕온도진행각향이성부식실험,병이용금상현미경대양품실시관찰병측량。학생재동수과정중가이리해각향이성상관공예,가강료교학효과。
To demonstrate the anisotropic wet etching process of IC Process Principles course,we guide students to design a set of（100） silicon with SiO2 film as mask square and do corrosion experiments.The students configure KOH solution themselves and set bath temperature for wet-etching experiment.They watch and measure changing sample by microscope.Finally,students understand the anisotropic process deeply.