CAJ | 학술논문

真空清洁、无油一直是业界追求的理想环境，而涡旋真空泵是一种新型的无油直排介质的机械泵，它具有动力传递简单、气体流动损失小、运行平稳、结构紧凑简单、密封性能好、消耗功率小、振动噪声低、可靠性高等优点；研究认为真空泵的无油化对获得清洁、无油真空环境至关重要；介绍了涡旋泵的发展历程、工作原理、结构类型以及相关厂家产品等并对涡旋真空泵的发展趋势进行了分析。
진공청길、무유일직시업계추구적이상배경，이와선진공빙시일충신형적무유직배개질적궤계빙，타구유동력전체간단、기체류동손실소、운행평은、결구긴주간단、밀봉성능호、소모공솔소、진동조성저、가고성고등우점；연구인위진공빙적무유화대획득청길、무유진공배경지관중요；개소료와선빙적발전역정、공작원리、결구류형이급상관엄가산품등병대와선진공빙적발전추세진행료분석。
Vacuum ,which is clean and oil-free, has been the ideal environment pursued by industry and scroll vacuum pump is a new mechanical pump with oil-free and in-line media and has the advantages such as simple power transmission, small gas flow loss, smooth operation, simple and compact structure, good sealing performance, small power consumption, low vibration noise, high reliability and so on. The research indicates that oil-free vacuum is critical to obtaining clean and oil-free vacuum environment. The development process, working principles, structure ,types and related products of scroll vacuum pump are introduced and the development trend of scroll vacuum pump is analyzed.