CAJ | 학술논문

完成了采用环形二极管结构的MEMS陀螺仪接口ASIC电路设计并且理论分析了环形肖特基二极管的温度特性对电路输出的影响。 MEMS陀螺仪系统采用高频载波调制方案，在陀螺仪可动质量块施加1MHz载波，将陀螺仪振动信号调制到载波附近。环形肖特基二极管作为调制解调器，解调陀螺仪输出已调信号得到陀螺仪振动信号。这种方案可以有效放大陀螺仪输出信号。理论和仿真结果表明，肖特基二极管阈值电压随温度的变化会改变电路增益，引入一个正温度系数。采用负温度系数反馈电阻，从而降低电路总的温度系数。 ASIC电路基于0.18μm CMOS工艺实现。
완성료채용배형이겁관결구적MEMS타라의접구ASIC전로설계병차이론분석료배형초특기이겁관적온도특성대전로수출적영향。 MEMS타라의계통채용고빈재파조제방안，재타라의가동질량괴시가1MHz재파，장타라의진동신호조제도재파부근。배형초특기이겁관작위조제해조기，해조타라의수출이조신호득도타라의진동신호。저충방안가이유효방대타라의수출신호。이론화방진결과표명，초특기이겁관역치전압수온도적변화회개변전로증익，인입일개정온도계수。채용부온도계수반궤전조，종이강저전로총적온도계수。 ASIC전로기우0.18μm CMOS공예실현。
This paper describes the design of interface ASIC based on ring Schottky dioed for MEMS gyroscope and analyzes influence of temperature characteristic of Schottky diode to the interface ASIC. A carrier of 1MHz is used to drive the mass and move the variation signal to the region nearby 1MHz by modulation. The modulated signal is de-modulated by ring Schottky diode. This scheme can amplify signal of gyroscope effectively. It shows that the non-ideality of Schottky diode varies gain of the circuit. Feedback resistor with negative temperature coefficient is used to decrease total temperature coefficient. This circuit is implemented in 0. 18 μm CMOS process.