CAJ | 학술논문

回顾了一种全新结构的干涉仪—自混合干涉仪（SMI）的发展情况。SMI由于其在激光器外部无需任何光学元件且应用范围广泛而倍受关注。SMI可用于测量与光路长度有关的一些量（如位移、小幅度振动、速度）,也可用于测量弱光的回波（即回波损耗和隔离因子的测量）并可表征与介质相互作用特性相关的物理参数（如激光线宽、相干长度以及α因子等）。SMI是一种相干探测方法,其工作在靠近接收场的量子极限处,目前对散射目标物的最小探测幅值可达槡20 pm/（Hz）～（1/2）甚至更高,使用角锥棱镜使其计数步长为半波长,在动态范围为2 m时其分辨率约为0.5μm。另外,SMI结构紧凑、易于现场安装且可用于MEMS测试、旋转机械振动测试和生物运行测试等各种实验。
회고료일충전신결구적간섭의—자혼합간섭의（SMI）적발전정황。SMI유우기재격광기외부무수임하광학원건차응용범위엄범이배수관주。SMI가용우측량여광로장도유관적일사량（여위이、소폭도진동、속도）,야가용우측량약광적회파（즉회파손모화격리인자적측량）병가표정여개질상호작용특성상관적물리삼수（여격광선관、상간장도이급α인자등）。SMI시일충상간탐측방법,기공작재고근접수장적양자겁한처,목전대산사목표물적최소탐측폭치가체상20 pm/（Hz）～（1/2）심지경고,사용각추릉경사기계수보장위반파장,재동태범위위2 m시기분변솔약위0.5μm。령외,SMI결구긴주、역우현장안장차가용우MEMS측시、선전궤계진동측시화생물운행측시등각충실험。
This paper reviews the development of a new configuration of interferometry,Self-mixing Interferometry（SMI）.SMI is attractive because it doesn＇t require any optical part external to the laser and can be employed in a variety of measurements,ranging from the traditional measurements related to optical path length like displacements,small-amplitude vibrations,velocity;to sensing of weak optical echoes,like return loss and isolation factor measurements;and also to a special feature for the interaction with the medium,measurements of physical parameters,like laser line width,coherence length,and the alfa factor.Because it is also a coherent detection scheme,the SMI operation is close to the quantum limit of received field and the minimum detectable amplitudes of 20 pm /（Hz）～（1/2） or better are currently achieved upon operation on diffusive targets,whereas a corner cube allows half-wavelength counting mode or 0.5 μm resolution on a dynamic range up to 2 m.SMI has a compact setup,and is easy to deploy in the field and can interface a variety of experiments from MEMS testing to rotating machine vibration testing to pickup of biological motility as described in the paper.