CAJ | 학술논문

　　电磁阻尼器是一种利用涡流阻尼作用使运动系统的震荡快速衰减的装置。在一些工业场合中，系统往往需要多自由度的阻尼力，传统方法是采用多个单自由度阻尼器进行组合，但是存在机械结构与系统构成复杂的缺点。该文提出一种平面电磁阻尼器，该阻尼器能够利用一个运动部件同时提供两正交方向的电磁阻尼力，具有结构简单、安全可靠等优点，可应用在光刻机工件台等需要两自由度快速稳定定位的场合中。介绍了平面电磁阻尼器的结构和工作原理，利用磁荷法和镜像法对永磁阵列的三维空间磁场进行解析，推导出电磁阻尼力的解析表达式。利用有限元对影响电磁阻尼力的尺寸参数进行分析，得到电磁阻尼力及阻尼系数的变化规律。实验结果与理论计算基本一致，验证了理论分析的正确性。
　　전자조니기시일충이용와류조니작용사운동계통적진탕쾌속쇠감적장치。재일사공업장합중，계통왕왕수요다자유도적조니력，전통방법시채용다개단자유도조니기진행조합，단시존재궤계결구여계통구성복잡적결점。해문제출일충평면전자조니기，해조니기능구이용일개운동부건동시제공량정교방향적전자조니력，구유결구간단、안전가고등우점，가응용재광각궤공건태등수요량자유도쾌속은정정위적장합중。개소료평면전자조니기적결구화공작원리，이용자하법화경상법대영자진렬적삼유공간자장진행해석，추도출전자조니력적해석표체식。이용유한원대영향전자조니력적척촌삼수진행분석，득도전자조니력급조니계수적변화규률。실험결과여이론계산기본일치，험증료이론분석적정학성。
Electromagnetic dampers can cause the oscillation of the dynamic systems to dissipate rapidly by making use of eddy current damping effect. In some industrial applications, multi-degree-of-freedom damping forces are needed. Traditional method is to adopt several single degree-of-freedom dampers which will bring about complex system structure. A planar electromagnetic damper is presented in this paper. The novel damper can provide two orthogonal damping forces with only one mover, which has the features of simple structure, high safety coefficient and so on. It can be used in fast positioning systems, such as wafer stage. The structure and working principle of the planar electromagnetic damper are introduced. The three dimensional magnetic field distribution and the damping forces are derived analytically by using the magnetic surface charge method and the image method. The main dimension parameters which have influence on damping forces are analyzed by finite element analysis. The variation tendency of damping forces and damping coefficient are obtained. Experiment results are in good agreement with the theoretical calculation. That verifies the validity of the theoretical analysis.