计算机与网络
計算機與網絡
계산궤여망락
CHINA COMPUTER & NETWORK
2012年
13期
63-65
,共3页
RF%MEMS%小型化应用
RF%MEMS%小型化應用
RF%MEMS%소형화응용
RF MEMS%miniaturization application
文章首先阐述了微电子机械系统（MEMS）技术的基本概念、工艺流程及发展概况;其次,介绍了RF MEMS技术在射频系统中的应用及RF MEMS器件在功耗、体积、质量、性能和成本上的优势;最后重点介绍了RF MEMS技术应用,包括RF MEMS开关、移相器、谐振器和滤波器等典型微波元器件,分析其结构特征、发展现状和相对于传统器件的性能优势,在此基础上展望RF MEMS技术应用前景。
文章首先闡述瞭微電子機械繫統（MEMS）技術的基本概唸、工藝流程及髮展概況;其次,介紹瞭RF MEMS技術在射頻繫統中的應用及RF MEMS器件在功耗、體積、質量、性能和成本上的優勢;最後重點介紹瞭RF MEMS技術應用,包括RF MEMS開關、移相器、諧振器和濾波器等典型微波元器件,分析其結構特徵、髮展現狀和相對于傳統器件的性能優勢,在此基礎上展望RF MEMS技術應用前景。
문장수선천술료미전자궤계계통（MEMS）기술적기본개념、공예류정급발전개황;기차,개소료RF MEMS기술재사빈계통중적응용급RF MEMS기건재공모、체적、질량、성능화성본상적우세;최후중점개소료RF MEMS기술응용,포괄RF MEMS개관、이상기、해진기화려파기등전형미파원기건,분석기결구특정、발전현상화상대우전통기건적성능우세,재차기출상전망RF MEMS기술응용전경。
The basic concept, technological flow and development situation of micro-electro-mechanical systems （MEMS） technology are described firstly. The application of RF-MEMS technology in RF fields and the advantages of RF MEMS device in power consumption, volume, weight, RF capabilities and cost are mainly presented secondly. Finally, the application of RF-MEMS devices is introduced, including RF MEMS switch, phase shifter, resonator and filter. Their structural feature, development status and advantages compared to the traditional device are analyzed. Based on the analysis, the application prospect of RF MEMS technology is described.
