CAJ | 학술논문

多晶硅尾气回收中吸附塔再生气的主要成分为氢气，回收利用价值较高。阐述了多晶硅尾气回收吸附塔再生气冷凝气相回收利用的过程。分析发现吸附塔反吹气，经三级冷却将反吹气中的HCI、氯硅烷，进行分离回收，所得气相氢气回收再利用，造成回收氢气中的甲烷、氮气含量随时间变化累计增加。再生分离所得气相部分需要经过再处理才可进行回收利用。
다정규미기회수중흡부탑재생기적주요성분위경기，회수이용개치교고。천술료다정규미기회수흡부탑재생기냉응기상회수이용적과정。분석발현흡부탑반취기，경삼급냉각장반취기중적HCI、록규완，진행분리회수，소득기상경기회수재이용，조성회수경기중적갑완、담기함량수시간변화루계증가。재생분리소득기상부분수요경과재처리재가진행회수이용。
Regeneration gas in adsorption tower of the the polysilicon exhaust recycle was mainly composed of hydrogen with higher recycling value. This paper describes regeneration gas condensate recycling process of the adsorption tower of the polysilicon tail recovery HCI and chlorosilane in the three cooling anti-blow gas were sepa- rated and recovered, obtained hydrogen can be recovered and again used. The contents of mathane and nitrogen in the recovery hydrogen were increased with time increase. The gas phase section should be retreated before recycling use.