苏州大学学报:工科版
囌州大學學報:工科版
소주대학학보:공과판
Journal of Soochow University Engineering Science Edition (Bimonthly)
2012年
4期
1-6
,共6页
三轴测量%硅霍尔传感器%磁集中器%灵敏度
三軸測量%硅霍爾傳感器%磁集中器%靈敏度
삼축측량%규곽이전감기%자집중기%령민도
3 D measurement%silicon Hall sensor%magnetic flux concentrator%sensitivity
介绍了霍尔传感器的工作原理,针对地磁测量的应用制作了基于十字形结构的硅霍尔传感器,并测试了器件灵敏度。测试结果显示灵敏度与器件工作区的掺杂浓度(NS)成反比,与器件十字形结构的长宽比(L/W)成正向依赖关系。详细介绍了磁集中器的原理及集成工艺,测试结果显示制作的器件实现了三轴测量,且三轴输出与理论预期相符。
介紹瞭霍爾傳感器的工作原理,針對地磁測量的應用製作瞭基于十字形結構的硅霍爾傳感器,併測試瞭器件靈敏度。測試結果顯示靈敏度與器件工作區的摻雜濃度(NS)成反比,與器件十字形結構的長寬比(L/W)成正嚮依賴關繫。詳細介紹瞭磁集中器的原理及集成工藝,測試結果顯示製作的器件實現瞭三軸測量,且三軸輸齣與理論預期相符。
개소료곽이전감기적공작원리,침대지자측량적응용제작료기우십자형결구적규곽이전감기,병측시료기건령민도。측시결과현시령민도여기건공작구적참잡농도(NS)성반비,여기건십자형결구적장관비(L/W)성정향의뢰관계。상세개소료자집중기적원리급집성공예,측시결과현시제작적기건실현료삼축측량,차삼축수출여이론예기상부。
In this paper, we introduce the work principle of the Hall sensors which are used to measure the magnetic field based on Hall cross. We measure the sensitivity and find that it is inversely proportional to the doping concentration of the active areas. However it increases with the L/W ratio of the Hall cross. We introduce the principle of the integrated magnetic flux concentrator and fabrication processes. After testing, 3D measurement is obtained and the 3D outputs are well agreed with the calculated ones.