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2013年
z1期
70-75
,共6页
李晓蔚%陈际达%徐缓%陈世金%郭茂桂%何为%冯立江%俊锋
李曉蔚%陳際達%徐緩%陳世金%郭茂桂%何為%馮立江%俊鋒
리효위%진제체%서완%진세금%곽무계%하위%풍립강%준봉
单纯型法%效应分析%CO2激光%微盲孔
單純型法%效應分析%CO2激光%微盲孔
단순형법%효응분석%CO2격광%미맹공
Simplex Optimization%Effect Analysis%CO2 laser%Micro-Blind Vias
文章应用单纯型法,对CO2激光制作孔径为100μm的盲孔参数进行优化。以盲孔的真圆度和上下孔径比为优化目标函数,经优化过程获得最佳工艺参数,并对最佳工艺参数进行实验验证。根据水平效应关系对影响CO2激光钻孔的因素进行效应分析,从而确定因素之间的主次关系。结果表明,最佳工艺参数为:脉宽13.8μs,脉冲能量14.8 mJ,脉冲次数2,光圈(Mask)2.2 mm,所得盲孔孔型最好,真圆度达到99.32%,上下孔径比为82.36%。对真圆度影响的主次关系是:脉冲能量>脉冲宽度>脉冲次数>Mask;对上下孔径比影响的主次关系是:Mask>脉冲能量>脉冲宽度>脉冲次数。该方法得到的最佳工艺参数能够为实际生产提供参考。
文章應用單純型法,對CO2激光製作孔徑為100μm的盲孔參數進行優化。以盲孔的真圓度和上下孔徑比為優化目標函數,經優化過程穫得最佳工藝參數,併對最佳工藝參數進行實驗驗證。根據水平效應關繫對影響CO2激光鑽孔的因素進行效應分析,從而確定因素之間的主次關繫。結果錶明,最佳工藝參數為:脈寬13.8μs,脈遲能量14.8 mJ,脈遲次數2,光圈(Mask)2.2 mm,所得盲孔孔型最好,真圓度達到99.32%,上下孔徑比為82.36%。對真圓度影響的主次關繫是:脈遲能量>脈遲寬度>脈遲次數>Mask;對上下孔徑比影響的主次關繫是:Mask>脈遲能量>脈遲寬度>脈遲次數。該方法得到的最佳工藝參數能夠為實際生產提供參攷。
문장응용단순형법,대CO2격광제작공경위100μm적맹공삼수진행우화。이맹공적진원도화상하공경비위우화목표함수,경우화과정획득최가공예삼수,병대최가공예삼수진행실험험증。근거수평효응관계대영향CO2격광찬공적인소진행효응분석,종이학정인소지간적주차관계。결과표명,최가공예삼수위:맥관13.8μs,맥충능량14.8 mJ,맥충차수2,광권(Mask)2.2 mm,소득맹공공형최호,진원도체도99.32%,상하공경비위82.36%。대진원도영향적주차관계시:맥충능량>맥충관도>맥충차수>Mask;대상하공경비영향적주차관계시:Mask>맥충능량>맥충관도>맥충차수。해방법득도적최가공예삼수능구위실제생산제공삼고。
Simplex optimization was studied for parameter optimization of CO2 laser during drilling the blind hole of 100μm in diameter. The optimum parameters were obtained and tested while composite index of roundness and ratio of upper and lower aperture was applied as optimization target. The effects of factors, such as laser energy, diameter of beam, pulse width and pulse shot, on roundness as well as ratio of upper and lower aperture were analyzed. The experimental data showed that the optimum parameters are pulse width 13.8 μs, laser energy 14.8 mJ, pulse shot 2, and mask 2.2 mm, resulting in the roundness 99.32%, and ratio of upper and lower aperture 82.36%. The importance of factors from primary to secondary on roundness is:pulse energy>pulse width>pulse shot>Mask, and on ratio of upper and lower aperture is:Mask pulse>energy>pulse width>pulse shot. In generally, the optimized parameters are important references for industrial production.