CAJ | 학술논문

文章通过在实验室试验显影液中干膜负载量与显影液浓度、pH值的相关性，运用Minitab工具确定显影液干膜负载量与pH值的线性关系，同时根据供应商提供的干膜显影负载量上限值，计算出相应的显影液pH值参数范围。当显影液pH降低至要求范围下限值时，表示显影液中干膜负载量已经达到要求上限，显影液需及时更换处理，故可通过pH值变化来监控显影液中干膜的负载量。
문장통과재실험실시험현영액중간막부재량여현영액농도、pH치적상관성，운용Minitab공구학정현영액간막부재량여pH치적선성관계，동시근거공응상제공적간막현영부재량상한치，계산출상응적현영액pH치삼수범위。당현영액pH강저지요구범위하한치시，표시현영액중간막부재량이경체도요구상한，현영액수급시경환처리，고가통과pH치변화래감공현영액중간막적부재량。
This paper has verified the correlation between the developer resist loading and developer concentration, pH value in the laboratory. Also it conifrms the linear relationship between the resist loading and pH value by Minitab tool. According to the upper limit value of resist loading which is provided by supplier, we can calculate the pH value range of developer. When the developer pH value reduce to the lower limit of the range required ,it means the resist loading reach the upper limit of the range required and have to change the developer .So we can monitor the resist loading by the pH value.