CAJ | 학술논문

为了提高VCSEL的光电性能，设计了一种内腔接触式VCSEL结构器件。本文采用Crosslight PICS3D分析软件，分别对相同外延生长情况下的980nm VCSEL传统结构和内腔接触式结构的光电性能进行模拟。经模拟得到，传统结构器件的阈值电流为8.76mA，内腔接触式结构的阈值电流为6.23mA，低于传统结构；当器件的注入电流均为25mA、在阈值电流三倍附近时，传统结构器件的输出功率为5.6mW，内腔接触式结构器件为7mW，器件输出功率和转换效率得到提高，光电性能得到改善，且稳定工作。
위료제고VCSEL적광전성능，설계료일충내강접촉식VCSEL결구기건。본문채용Crosslight PICS3D분석연건，분별대상동외연생장정황하적980nm VCSEL전통결구화내강접촉식결구적광전성능진행모의。경모의득도，전통결구기건적역치전류위8.76mA，내강접촉식결구적역치전류위6.23mA，저우전통결구；당기건적주입전류균위25mA、재역치전류삼배부근시，전통결구기건적수출공솔위5.6mW，내강접촉식결구기건위7mW，기건수출공솔화전환효솔득도제고，광전성능득도개선，차은정공작。
The intra-contact vertical cavity surface emitting lasers (VCSEL) has been designed to improve the optical and electrical performance. The output characteristics of intra-contact and traditional 980nm VCSELs with same growth conditions are compared by simulation with PICS3D of Crosslight. The results shows that the threshold current of in-tra-contact device is 6.23mA,while that of traditional device is 8.76mA. At the injection current of 25mA,the output power are 7mW and 5.6mW for the intra-contact and traditional devices,respectively. The output power and wall-plug efficiency are increased which is benefit from the improvement of optical and electrical performance.