CAJ | 학술논문

提出了一种电解电火花铣削加工半导体硅材料的方法，对单晶硅片进行电解电火花铣削加工实验。在不同电参数和不同铣削轨迹重叠率的条件下进行加工实验，分析二者对电解电火花铣削硅材料表面质量的影响。实验结果表明：脉冲能量越高，表面质量越差；工具电极运动轨迹重叠率越高，表面质量越好。
제출료일충전해전화화선삭가공반도체규재료적방법，대단정규편진행전해전화화선삭가공실험。재불동전삼수화불동선삭궤적중첩솔적조건하진행가공실험，분석이자대전해전화화선삭규재료표면질량적영향。실험결과표명：맥충능량월고，표면질량월차；공구전겁운동궤적중첩솔월고，표면질량월호。
A machining method of silicon which is one of the semiconductors in electrochemical discharge milling is proposed. The experiment on machining monocrystalline silicon wafer in electrochemical discharge milling is conducted. The process experiments with different electrical parameters and milling track overlap ratio have been conducted. The effect of two parameters on the surface quality of silicon machined by electrochemical discharge milling is analyzed, The results show that the surface quality decreases with the increase of pulse energy and increases with the increase of the tool path overlap ratio.