CAJ | 학술논문

研究硅掺杂对 CVD 金刚石薄膜形貌、结构特性和成分的影响。通过向丙酮中加入正硅酸乙酯作为反应气体，在硅基底上沉积硅掺杂 CVD 金刚石薄膜。金刚石薄膜的表面形貌和显微组织由场发射电镜表征。金刚石薄膜的成分通过拉曼光谱和X射线衍射(XRD)进行研究。薄膜的表面粗糙度由表面轮廓仪评估。结果表明，硅掺杂会降低晶粒尺寸，促进晶粒细化并抑制三角锥形形貌。XRD 研究表明，(111)朝向的晶面显著减少。拉曼光谱研究表明，硅掺杂会促进薄膜中硅碳键的形成以及非金刚石相的增多。在硅碳浓度比为1%时，沉积得到光滑的细晶粒金刚石薄膜。
연구규참잡대 CVD 금강석박막형모、결구특성화성분적영향。통과향병동중가입정규산을지작위반응기체，재규기저상침적규참잡 CVD 금강석박막。금강석박막적표면형모화현미조직유장발사전경표정。금강석박막적성분통과랍만광보화X사선연사(XRD)진행연구。박막적표면조조도유표면륜곽의평고。결과표명，규참잡회강저정립척촌，촉진정립세화병억제삼각추형형모。XRD 연구표명，(111)조향적정면현저감소。랍만광보연구표명，규참잡회촉진박막중규탄건적형성이급비금강석상적증다。재규탄농도비위1%시，침적득도광활적세정립금강석박막。
The effects of Si doping on morphology, components and structure characteristics of CVD diamond films were studied. Si-doped CVD diamond films were deposited on Si substrate by adding tetraethoxysilane (TEOS) into acetone as source of reactant gas. The morphology and microstructure of diamond films were characterized by scanning electron microcopy (SEM). The crystalline quality of diamond films was studied by Raman spectroscopy and X-ray diffractometry (XRD). The surface roughness of the films was evaluated with surface profilometer. The results suggest that Si doping tends to reduce the crystallite size, enhance grain refinement and inhibit the appearance of (111) facets. Raman spectra indicate that Si doping can enhance the formation of sp2 phase in diamond films. Moreover, Raman signal of SiC was detected, which suggests the existence of Si in the diamond films. Smooth fine-grained diamond (SFGD) film was synthesized at Si to C ratio of 1%.