电子工业专用设备
電子工業專用設備
전자공업전용설비
EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
2012年
6期
35-38,48
,共5页
合成炉%砷化镓多晶%设计与制造
閤成爐%砷化鎵多晶%設計與製造
합성로%신화가다정%설계여제조
Synthesized furnace%GaAs polycrystal%Design or manufactrue
在分析原卧式砷化镓多晶合成炉缺陷的基础上．借鉴其它进口砷化镓单晶炉体部分结构优点，综合创新设计等制造出立式砷化镓多晶合成炉。经过300多炉次砷化镓多晶合成，证实新型砷化镓合成炉具有装、取料方便、电极不易沉积砷、炉体清洁快速等优点。由于提高了新合成炉密闭性及增强了石墨系统稳定性，从而保证了砷化镓多晶合成产品的一致性。
在分析原臥式砷化鎵多晶閤成爐缺陷的基礎上．藉鑒其它進口砷化鎵單晶爐體部分結構優點，綜閤創新設計等製造齣立式砷化鎵多晶閤成爐。經過300多爐次砷化鎵多晶閤成，證實新型砷化鎵閤成爐具有裝、取料方便、電極不易沉積砷、爐體清潔快速等優點。由于提高瞭新閤成爐密閉性及增彊瞭石墨繫統穩定性，從而保證瞭砷化鎵多晶閤成產品的一緻性。
재분석원와식신화가다정합성로결함적기출상．차감기타진구신화가단정로체부분결구우점，종합창신설계등제조출입식신화가다정합성로。경과300다로차신화가다정합성，증실신형신화가합성로구유장、취료방편、전겁불역침적신、로체청길쾌속등우점。유우제고료신합성로밀폐성급증강료석묵계통은정성，종이보증료신화가다정합성산품적일치성。
Based on the analysis defected of the GaAs polycystal synthesized horizontal fumace,make reference to other import GaAs crystal fumace body＇s structure advantage,We have been designed and manufactured GaAs polycrstal vertical Synthesized furnace. The furnace passed through 300 times running,have been approved this new type GaAs synthesizer with advantage of easily charge and discharge material and difficult to deposit arsenic on the electropolar and easy cleanning of the inside furnace .Improved synthsizer leakproofness and enhanced the graphite thermal system stability, So ensured quality consistency of the GaAs Polvcvstal materials.
