中国材料进展
中國材料進展
중국재료진전
MATERIALS CHINA
2012年
7期
42-50
,共9页
王艺程%张怀武%鲁广铎%白飞明
王藝程%張懷武%魯廣鐸%白飛明
왕예정%장부무%로엄탁%백비명
高频软磁薄膜%纳米材料%磁导率%铁磁共振频率
高頻軟磁薄膜%納米材料%磁導率%鐵磁共振頻率
고빈연자박막%납미재료%자도솔%철자공진빈솔
high frequency soft magnetic thin films%nanocrystalline materials%permeability%ferromagnetic resonance frequency
由于高频软磁薄膜材料具有巨大的应用前景因此获得了人们广泛的关注。对纳米合金软磁薄膜、纳米软磁颗粒膜、多层膜以及图形化薄膜进行了分类综述，分别介绍了各类薄膜的制备方法、化学成分、微观结构特点和高频物理性能，并对影响其性能的主要因素进行了讨论。由于纳米高频软磁薄膜材料相对于传统磁性材料具有显著优势，所以纳米合金软磁薄膜有望取代铁氧体作为制作高频磁性器件的主要应用材料。由于纳米软磁颗粒膜、多层膜以及新兴的图形化薄膜具有材料结构设计和物性剪裁的自由度，因此将是今后的重点研究方向。
由于高頻軟磁薄膜材料具有巨大的應用前景因此穫得瞭人們廣汎的關註。對納米閤金軟磁薄膜、納米軟磁顆粒膜、多層膜以及圖形化薄膜進行瞭分類綜述，分彆介紹瞭各類薄膜的製備方法、化學成分、微觀結構特點和高頻物理性能，併對影響其性能的主要因素進行瞭討論。由于納米高頻軟磁薄膜材料相對于傳統磁性材料具有顯著優勢，所以納米閤金軟磁薄膜有望取代鐵氧體作為製作高頻磁性器件的主要應用材料。由于納米軟磁顆粒膜、多層膜以及新興的圖形化薄膜具有材料結構設計和物性剪裁的自由度，因此將是今後的重點研究方嚮。
유우고빈연자박막재료구유거대적응용전경인차획득료인문엄범적관주。대납미합금연자박막、납미연자과립막、다층막이급도형화박막진행료분류종술，분별개소료각류박막적제비방법、화학성분、미관결구특점화고빈물이성능，병대영향기성능적주요인소진행료토론。유우납미고빈연자박막재료상대우전통자성재료구유현저우세，소이납미합금연자박막유망취대철양체작위제작고빈자성기건적주요응용재료。유우납미연자과립막、다층막이급신흥적도형화박막구유재료결구설계화물성전재적자유도，인차장시금후적중점연구방향。
Soft magnetic thin films have attracted much attention due to their great potentials in high frequency applications. The article summarizes the recent progress of nanocrystalline alloy soft magnetic films, nanogranular soft magnetic films, muhilayer films and graphical films, respectively. Special attentions were given to the film preparation techniques, the chemical composition, the microstructure and the high frequency physical properties of the different films, and the main factors affecting the magnetic and high frequency properties were also discussed. Because of the much better properties and performance, nanocrystalline alloy soft magnetic films have replaced the ferrites as the major materials used in high frequency devices. Meanwhile, nanogranular soft magnetic films, multilayer films and emerging graphical films will be the trend in future, thanks to their great freedom in designing microstructure and tailoring materials properties.
