CAJ | 학술논문

提出一种集传感和弹性运动副于一体的光纤柔性铰链，并通过光纤柔性铰链构造并联平台，实现六维微位姿的在线检测。这种光纤柔性铰链基于光纤曲率传感器的测量原理，通过检测光纤柔性铰链的角位移来获得微动平台的位置与方向。研究了光纤柔性铰链的位姿测量原理和曲率测量机理，以及直线位移和角位移同光纤柔性铰链曲率的变化关系，分析了传感器各参数对灵敏度的影响；利用光纤柔性铰链灵敏度具有方向性的特点制作六维位姿测量平台，减小传感器的维间耦合；设计了传感器的标定模型及标定方案并通过实验验证。这种六维微位姿测量传感平台具有结构紧凑，测量力小，测量行程大的特点，适合应用于微操作系统中的多维微位姿的在线检测和末端执行器的微位姿闭环控制。
제출일충집전감화탄성운동부우일체적광섬유성교련，병통과광섬유성교련구조병련평태，실현륙유미위자적재선검측。저충광섬유성교련기우광섬곡솔전감기적측량원리，통과검측광섬유성교련적각위이래획득미동평태적위치여방향。연구료광섬유성교련적위자측량원리화곡솔측량궤리，이급직선위이화각위이동광섬유성교련곡솔적변화관계，분석료전감기각삼수대령민도적영향；이용광섬유성교련령민도구유방향성적특점제작륙유위자측량평태，감소전감기적유간우합；설계료전감기적표정모형급표정방안병통과실험험증。저충륙유미위자측량전감평태구유결구긴주，측량력소，측량행정대적특점，괄합응용우미조작계통중적다유미위자적재선검측화말단집행기적미위자폐배공제。
An optical fiber flexure hinge (OFFH) is presented which incorporate sensor with elastic kinematic pair, they are built into a parallel mechanism for in situ 6-DOF micro displacement and orientation measurement. The operation principle is based on bending measurement of flexure hinge itself by curvature optical fiber sensor and transfer the angular displacement of OFFH to the parallel platform’s micro position and orientation displacement. The operation principle of OFFH and curvature measurement principle is studied and parameters of optical fiber sensor that in relation to sensitivity are analyzed. The sensitivity of OFFH is in relation to orientation and is used for multi-dimensional measurement decoupling. The calibration model and method is designed and a 6-DOF micro position and orientation measurement experiment system has set up. This new sensor is compact, with wider measurement range and small measurement force, which is suitable for multi dimensional micro operating system in situ micro displacement and orientation close loop control.