CAJ | 학술논문

金刚石膜拥有许多优异的性能。在制备金刚石膜的各种方法之中，高功率微波等离子体化学气相沉积（MPCVD）法因其产生的等离子体密度高，同时金刚石膜沉积过程的可控性和洁净性好，因而一直是制备高品质金刚石膜的首选方法。在世界范围内，美、英、德、日、法等先进国家均已掌握了以高功率MPCVD法沉积高品质金刚石膜的技术。但在我国国内，高功率MPCVD装备落后一直是困扰我国高品质金刚石膜制备技术发展的主要障碍．首先综述国际上高功率MPCVD装备和高品质金刚石膜制备技术的发展现状，包括各种高功率MPCVD装置的特点。其后，回顾了我国金刚石膜MPCVD技术的发展历史，并介绍北京科技大学近年来在发展高功率MPCVD装备和高品质金刚石膜制备技术方面取得的新进展。
금강석막옹유허다우이적성능。재제비금강석막적각충방법지중，고공솔미파등리자체화학기상침적（MPCVD）법인기산생적등리자체밀도고，동시금강석막침적과정적가공성화길정성호，인이일직시제비고품질금강석막적수선방법。재세계범위내，미、영、덕、일、법등선진국가균이장악료이고공솔MPCVD법침적고품질금강석막적기술。단재아국국내，고공솔MPCVD장비락후일직시곤우아국고품질금강석막제비기술발전적주요장애．수선종술국제상고공솔MPCVD장비화고품질금강석막제비기술적발전현상，포괄각충고공솔MPCVD장치적특점。기후，회고료아국금강석막MPCVD기술적발전역사，병개소북경과기대학근년래재발전고공솔MPCVD장비화고품질금강석막제비기술방면취득적신진전。
Diamond films possess many remarkable properties. Among the various techniques to deposit diamond films,high power microwave plasma chemical vapor deposition （MPCVD） method has the advantages of high density plasma, good controllability and clean environment free from electrode material contamination. Therefore, MPCVD has remains the primary technique useful for depositing high quality diamond films. Western countries have developed abilities to deposit high quality diamond fihns by using high power MPCVD techniques. In contrast, slow development in high power MPCVD apparatus has remained a main obstacle for China to develop its ability to produce high quality diamond films material. In this article, we first review the evolution of high power MPCVD diamond films deposition techniques both abroad and at home. Then, we will present new results of our recent effort to develop high power MPCVD diamond films deposition techniques.