CAJ | 학술논문

在MEMS器件中应用的各类薄膜材料在制备过程所产生的残余应力，对器件的性能和可靠性具有较大的影响．设计了一种用于残余应力在线检测的柔性铰链放大机构，并对柔性铰链的结构尺寸与放大机构的角变形和转动刚度的关系进行理论建模，利用FEA软件对3种不同类型柔性铰链的转动刚度进行了数值仿真，为用于残余应力检测的微指针结构的放大机构的优化设计提供了前期研究基础．
재MEMS기건중응용적각류박막재료재제비과정소산생적잔여응력，대기건적성능화가고성구유교대적영향．설계료일충용우잔여응력재선검측적유성교련방대궤구，병대유성교련적결구척촌여방대궤구적각변형화전동강도적관계진행이론건모，이용FEA연건대3충불동류형유성교련적전동강도진행료수치방진，위용우잔여응력검측적미지침결구적방대궤구적우화설계제공료전기연구기출．
Applications in MEMS devices of all kinds of thin films produced. The residual stress formed in the thin films applied in MEMS devices during the preparation, its performance and reliability has a great impact on the devices. A flexible hinge amplification mechanism for on line detection of residual stress was designed,and theoretical modeling between the relationship of the flexible hinge structure, size and the amplification mechanism of angular distortion and the rotation stiffness was constructed. The rotational stiffness of the three-type flexible hinges was simulated with FEA. Based on theoretical modeling and numerical simulation, the amplification mechanisms for residual stress detection system were analyzed, which provided a basis for preliminary study.